An-Chi Li

Person

Hsinchu County, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Baffle plate for controlling wafer uniformity and methods for makin...
- Patent number 11,615,946
- Issue date Mar 28, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jr-Sheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating semiconductor structure
- Patent number 10,964,547
- Issue date Mar 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating semiconductor structure
- Patent number 10,529,578
- Issue date Jan 7, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DEVICES AND METHODS FOR CONTROLLING WAFER UNIFORMITY IN PLASMA-BASE...
- Publication number 20220359165
- Publication date Nov 10, 2022
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Jr-Sheng CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BAFFLE PLATE FOR CONTROLLING WAFER UNIFORMITY AND METHODS FOR MAKIN...
- Publication number 20220359168
- Publication date Nov 10, 2022
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Jr-Sheng CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR STRUCUTRE
- Publication number 20200098583
- Publication date Mar 26, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BAFFLE PLATE FOR CONTROLLING WAFER UNIFORMITY AND METHODS FOR MAKIN...
- Publication number 20200075294
- Publication date Mar 5, 2020
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Jr-Sheng CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICES AND METHODS FOR CONTROLLING WAFER UNIFORMITY IN PLASMA-BASE...
- Publication number 20200043705
- Publication date Feb 6, 2020
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Jr-Sheng CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR STRUCUTRE
- Publication number 20190148161
- Publication date May 16, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Person

Patents Grantslast 30 patents

Baffle plate for controlling wafer uniformity and methods for makin...

Method of fabricating semiconductor structure

Method of fabricating semiconductor structure

Patents Applicationslast 30 patents

DEVICES AND METHODS FOR CONTROLLING WAFER UNIFORMITY IN PLASMA-BASE...

BAFFLE PLATE FOR CONTROLLING WAFER UNIFORMITY AND METHODS FOR MAKIN...

METHOD OF FABRICATING SEMICONDUCTOR STRUCUTRE

BAFFLE PLATE FOR CONTROLLING WAFER UNIFORMITY AND METHODS FOR MAKIN...

DEVICES AND METHODS FOR CONTROLLING WAFER UNIFORMITY IN PLASMA-BASE...

METHOD OF FABRICATING SEMICONDUCTOR STRUCUTRE