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AIR SPACER AND METHOD OF FORMING SAME
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Publication number 20240379820
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Publication date Nov 14, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Ming-Jhe Sie
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H01 - BASIC ELECTRIC ELEMENTS
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CUT METAL GATE PROCESSES
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Publication number 20240290620
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Publication date Aug 29, 2024
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Taiwan Semiconductor Manufacturing CO.,LTD.
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Shu-Uei Jang
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H01 - BASIC ELECTRIC ELEMENTS
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Air Spacer and Method of Forming Same
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Publication number 20230253479
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Publication date Aug 10, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Ming-Jhe Sie
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H01 - BASIC ELECTRIC ELEMENTS
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Cut Metal Gate Processes
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Publication number 20220384616
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Publication date Dec 1, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Shu-Uei Jang
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H01 - BASIC ELECTRIC ELEMENTS
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FINFET DEVICE AND METHOD
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Publication number 20220359735
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Publication date Nov 10, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chung-Shu Wu
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H01 - BASIC ELECTRIC ELEMENTS
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Air Spacer and Method of Forming Same
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Publication number 20210408266
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Publication date Dec 30, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Ming-Jhe Sie
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H01 - BASIC ELECTRIC ELEMENTS
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FINFET DEVICE AND METHOD
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Publication number 20210111272
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Publication date Apr 15, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chung-Shu Wu
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H01 - BASIC ELECTRIC ELEMENTS
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Cut Metal Gate Processes
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Publication number 20200350172
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Publication date Nov 5, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Shu-Uei Jang
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H01 - BASIC ELECTRIC ELEMENTS
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