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Ana Martin Hoyas
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Leuven, BE
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Surface preparation using plasma for ALD Films
Publication number
20040071878
Publication date
Apr 15, 2004
Interuniversitair Microelektronica Centrum (IMEC vzw)
Jorg Schuhmacher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...