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Ananth INDRAKANTI
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for forming self-aligned contacts/vias with high corner sele...
Patent number
9,263,331
Issue date
Feb 16, 2016
Lam Research Corporation
Ananth Indrakanti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to increase mask selectivity in ultra-high aspect ratio etches
Patent number
9,224,618
Issue date
Dec 29, 2015
Lam Research Corporation
Ananth Indrakanti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming self-aligned contacts/vias with high corner sele...
Patent number
9,105,700
Issue date
Aug 11, 2015
Lam Research Corporation
Ananth Indrakanti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed dielectric etch process for in-situ metal hard mask shape co...
Patent number
8,906,810
Issue date
Dec 9, 2014
Lam Research Corporation
Ananth Indrakanti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching self-aligned vias and trenches in a multi-layer f...
Patent number
8,668,835
Issue date
Mar 11, 2014
Lam Research Corporation
Ananth Indrakanti
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR FORMING SELF-ALIGNED CONTACTS/VIAS WITH HIGH CORNER SELE...
Publication number
20150325479
Publication date
Nov 12, 2015
LAM RESEARCH CORPORATION
Ananth INDRAKANTI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING SELF-ALIGNED CONTACTS/VIAS WITH HIGH CORNER SELE...
Publication number
20150170965
Publication date
Jun 18, 2015
LAM RESEARCH CORPORATION
Ananth INDRAKANTI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED DIELECTRIC ETCH PROCESS FOR IN-SITU METAL HARD MASK SHAPE CO...
Publication number
20140335697
Publication date
Nov 13, 2014
LAM RESEARCH CORPORATION
Ananth Indrakanti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH WITH INCREASED MASK SELECTIVITY
Publication number
20130180951
Publication date
Jul 18, 2013
LAM RESEARCH CORPORATION
Ananth INDRAKANTI
H01 - BASIC ELECTRIC ELEMENTS