Ananthanarayanan Mohan

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods of stabilizing measurement of ArF resist in CD-SEM
- Patent number 7,015,468
- Issue date Mar 21, 2006
- KLA-Tencor Technologies Corporation
- Amir Azordegan
- H01 - BASIC ELECTRIC ELEMENTS