Anastasia GONCHAR

Person

Fellbach, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical arrangement for EUV lithography
- Patent number 11,372,335
- Issue date Jun 28, 2022
- Carl Zeiss SMT GmbH
- Anastasia Gonchar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror, more particularly for a microlithographic projection exposu...
- Patent number 10,247,862
- Issue date Apr 2, 2019
- Carl Zeiss SMT GmbH
- Anastasia Gonchar
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...
- Publication number 20230257866
- Publication date Aug 17, 2023
- Carl Zeiss SMT GMBH
- Anastasia GONCHAR
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
OPTICAL ELEMENT, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR FORMING NAN...
- Publication number 20230076667
- Publication date Mar 9, 2023
- Carl Zeiss SMT GMBH
- Anastasia GONCHAR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT FOR REFLECTING EUV RADIATION, EUV LITHOGRAPHY SYSTE...
- Publication number 20220269162
- Publication date Aug 25, 2022
- Carl Zeiss SMT GMBH
- Anastasia GONCHAR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT AND EUV LITHOGRAPHIC SYSTEM
- Publication number 20220179329
- Publication date Jun 9, 2022
- Carl Zeiss SMT GMBH
- Anastasia Gonchar
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
OPTICAL ARRANGEMENT FOR EUV LITHOGRAPHY
- Publication number 20210003926
- Publication date Jan 7, 2021
- Carl Zeiss SMT GMBH
- Anastasia GONCHAR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR, MORE PARTICULARLY FOR A MICROLITHOGRAPHIC PROJECTION EXPOSU...
- Publication number 20180039001
- Publication date Feb 8, 2018
- Carl Zeiss SMT GMBH
- Anastasia GONCHAR
- G02 - OPTICS

Anastasia GONCHAR

Person

Patents Grantslast 30 patents

Optical arrangement for EUV lithography

Mirror, more particularly for a microlithographic projection exposu...

Patents Applicationslast 30 patents

METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...

OPTICAL ELEMENT, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR FORMING NAN...

OPTICAL ELEMENT FOR REFLECTING EUV RADIATION, EUV LITHOGRAPHY SYSTE...

OPTICAL ELEMENT AND EUV LITHOGRAPHIC SYSTEM

OPTICAL ARRANGEMENT FOR EUV LITHOGRAPHY

MIRROR, MORE PARTICULARLY FOR A MICROLITHOGRAPHIC PROJECTION EXPOSU...