Anatoly Romanovsky

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for rotating an optical objective
- Patent number 11,733,172
- Issue date Aug 22, 2023
- KLA Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Laser closed power loop with an acousto-optic modulator for power m...
- Patent number 11,374,375
- Issue date Jun 28, 2022
- KLA Corporation
- Mandar Paranjape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inspection
- Patent number 10,488,348
- Issue date Nov 26, 2019
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Surface defect inspection with large particle monitoring and laser...
- Patent number 10,324,045
- Issue date Jun 18, 2019
- KLA-Tencor Corporation
- Steve (Yifeng) Cui
- G01 - MEASURING TESTING
Information Patent Grant
System and method for reducing radiation-induced false counts in an...
- Patent number 10,241,217
- Issue date Mar 26, 2019
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for producing and measuring dynamically focuse...
- Patent number 10,215,712
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection
- Patent number 9,915,622
- Issue date Mar 13, 2018
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
TDI sensor in a darkfield system
- Patent number 9,891,177
- Issue date Feb 13, 2018
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for reducing radiation-induced false counts in an...
- Patent number 9,841,512
- Issue date Dec 12, 2017
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for simultaneous tilt and height control of a sub...
- Patent number 9,810,619
- Issue date Nov 7, 2017
- KLA-Tencor Corporation
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Grant
Laser with integrated multi line or scanning beam capability
- Patent number 9,678,350
- Issue date Jun 13, 2017
- KLA-Tencor Corporation
- Christian Wolters
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning inspection system with angular correction
- Patent number 9,587,936
- Issue date Mar 7, 2017
- KLA-Tencor Corporation
- Yury Yuditsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer inspection
- Patent number 9,279,774
- Issue date Mar 8, 2016
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Extended defect sizing range for wafer inspection
- Patent number 9,091,666
- Issue date Jul 28, 2015
- KLA-Tencor Corp.
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for producing and measuring dynamically focuss...
- Patent number 9,068,952
- Issue date Jun 30, 2015
- KLA-Tencor Corporation
- Aleksey Petrenko
- G01 - MEASURING TESTING
Information Patent Grant
Monitoring incident beam position in a wafer inspection system
- Patent number 8,934,091
- Issue date Jan 13, 2015
- KLA-Tencor Corp.
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Grant
Extending the lifetime of a deep UV laser in a wafer inspection tool
- Patent number 8,432,944
- Issue date Apr 30, 2013
- KLA-Technor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Fast laser power control with improved reliability for surface insp...
- Patent number 8,294,887
- Issue date Oct 23, 2012
- KLA-Tencor Corporation
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Dynamic range extension in surface inspection systems
- Patent number 8,134,698
- Issue date Mar 13, 2012
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Systems, circuits and methods for extending the detection range of...
- Patent number 7,777,875
- Issue date Aug 17, 2010
- KLA-Tencor Technologies Corp,
- Christian H. Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Contemporaneous surface and edge inspection
- Patent number 7,773,212
- Issue date Aug 10, 2010
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Inspection systems and methods for extending the detection range of...
- Patent number 7,746,462
- Issue date Jun 29, 2010
- KLA-Tencor Technologies Corporation
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Grant
Systems, circuits and methods for reducing thermal damage and exten...
- Patent number 7,671,982
- Issue date Mar 2, 2010
- KLA-Tencor Technologies Corp.
- Christian H. Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Systems, circuits and methods for reducing thermal damage and exten...
- Patent number 7,436,508
- Issue date Oct 14, 2008
- KLA-Tencor Technologies Corp.
- Christian H. Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Systems, circuits and methods for extending the detection range of...
- Patent number 7,423,250
- Issue date Sep 9, 2008
- KLA-Tencor Technologies Corp.
- Christian H. Wolters
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Systems, circuits and methods for extending the detection range of...
- Patent number 7,414,715
- Issue date Aug 19, 2008
- KLA-Tencor Technologies Corp.
- Christian H. Wolters
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS
- Publication number 20240230555
- Publication date Jul 11, 2024
- KLA Corporation
- Chunhai Wang
- G01 - MEASURING TESTING
Information Patent Application
GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS
- Publication number 20240133825
- Publication date Apr 25, 2024
- KLA Corporation
- Chunhai Wang
- G01 - MEASURING TESTING
Information Patent Application
Large-Particle Monitoring with Laser Power Control for Defect Inspe...
- Publication number 20220091047
- Publication date Mar 24, 2022
- KLA Corporation
- Anatoly Romanovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR ROTATING AN OPTICAL OBJECTIVE
- Publication number 20210356406
- Publication date Nov 18, 2021
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
Laser Closed Power Loop with an Acousto-Optic Modulator for Power M...
- Publication number 20210050700
- Publication date Feb 18, 2021
- KLA Corporation
- Mandar Paranjape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DE...
- Publication number 20200132608
- Publication date Apr 30, 2020
- KLA Corporation
- Raymond Chu
- G02 - OPTICS
Information Patent Application
Wafer Inspection
- Publication number 20180164228
- Publication date Jun 14, 2018
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Reducing Radiation-Induced False Counts in an...
- Publication number 20180045837
- Publication date Feb 15, 2018
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Application
Surface Defect Inspection With Large Particle Monitoring And Laser...
- Publication number 20180038803
- Publication date Feb 8, 2018
- KLA-Tencor Corporation
- Steve (Yifeng) Cui
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Reducing Radiation-Induced False Counts in an...
- Publication number 20160334516
- Publication date Nov 17, 2016
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Application
TDI Sensor in a Darkfield System
- Publication number 20160097727
- Publication date Apr 7, 2016
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G01 - MEASURING TESTING
Information Patent Application
Wafer Inspection
- Publication number 20150369753
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Producing and Measuring Dynamically Focuse...
- Publication number 20150330907
- Publication date Nov 19, 2015
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Scanning Inspection System With Angular Correction
- Publication number 20140278188
- Publication date Sep 18, 2014
- Yury Yuditsky
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Tilt and Height Control of a Substrate Surfac...
- Publication number 20140071457
- Publication date Mar 13, 2014
- KLA-Tencor Corporation
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Application
Monitoring Incident Beam Position in a Wafer Inspection System
- Publication number 20140071437
- Publication date Mar 13, 2014
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Application
Laser with Integrated Multi Line or Scanning Beam Capability
- Publication number 20130250385
- Publication date Sep 26, 2013
- KLA-Tencor Corporation
- Christian Wolters
- G02 - OPTICS
Information Patent Application
Extended Defect Sizing Range for Wafer Inspection
- Publication number 20130208269
- Publication date Aug 15, 2013
- KLA-Tencor Corporation
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Application
Wafer Inspection
- Publication number 20130016346
- Publication date Jan 17, 2013
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
Extending the lifetime of a Deep UV laser in a Wafer Inspection tool
- Publication number 20110315897
- Publication date Dec 29, 2011
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G02 - OPTICS
Information Patent Application
Method and apparatus for producing and Measuring dynamically focuss...
- Publication number 20110051132
- Publication date Mar 3, 2011
- Aleksey Petrenko
- G02 - OPTICS
Information Patent Application
SYSTEMS, CIRCUITS AND METHODS FOR REDUCING THERMAL DAMAGE AND EXTEN...
- Publication number 20090096505
- Publication date Apr 16, 2009
- KLA-Tencor Technologies Corporation
- Christian H. Wolters
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS, CIRCUITS AND METHODS FOR EXTENDING THE DETECTION RANGE OF...
- Publication number 20090040511
- Publication date Feb 12, 2009
- KLA-Tencor Technologies Corporation
- Christian H. Wolters
- G01 - MEASURING TESTING
Information Patent Application
Inspection Systems and Methods for Extending the Detection Range of...
- Publication number 20080291454
- Publication date Nov 27, 2008
- KLA-TENCOR TECHNOLOGIES CORP.
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Application
Systems, circuits and methods for extending the detection range of...
- Publication number 20070013899
- Publication date Jan 18, 2007
- Christian H. Wolters
- G01 - MEASURING TESTING
Information Patent Application
Systems, circuits and methods for reducing thermal damage and exten...
- Publication number 20070013898
- Publication date Jan 18, 2007
- Christian H. Wolters
- G01 - MEASURING TESTING
Information Patent Application
Systems, circuits and methods for extending the detection range of...
- Publication number 20070012867
- Publication date Jan 18, 2007
- Christian H. Wolters
- H03 - BASIC ELECTRONIC CIRCUITRY

Anatoly Romanovsky

Person

Patents Grantslast 30 patents

Apparatus and method for rotating an optical objective

Laser closed power loop with an acousto-optic modulator for power m...

Wafer inspection

Surface defect inspection with large particle monitoring and laser...

System and method for reducing radiation-induced false counts in an...

Method and apparatus for producing and measuring dynamically focuse...

Wafer inspection

TDI sensor in a darkfield system

System and method for reducing radiation-induced false counts in an...

Method and system for simultaneous tilt and height control of a sub...

Laser with integrated multi line or scanning beam capability

Scanning inspection system with angular correction

Wafer inspection

Extended defect sizing range for wafer inspection

Method and apparatus for producing and measuring dynamically focuss...

Monitoring incident beam position in a wafer inspection system

Extending the lifetime of a deep UV laser in a wafer inspection tool

Fast laser power control with improved reliability for surface insp...

Dynamic range extension in surface inspection systems

Systems, circuits and methods for extending the detection range of...

Contemporaneous surface and edge inspection

Inspection systems and methods for extending the detection range of...

Systems, circuits and methods for reducing thermal damage and exten...

Systems, circuits and methods for reducing thermal damage and exten...

Systems, circuits and methods for extending the detection range of...

Systems, circuits and methods for extending the detection range of...

Patents Applicationslast 30 patents

GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS

GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS

Large-Particle Monitoring with Laser Power Control for Defect Inspe...

APPARATUS AND METHOD FOR ROTATING AN OPTICAL OBJECTIVE

Laser Closed Power Loop with an Acousto-Optic Modulator for Power M...

SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DE...

Wafer Inspection

System and Method for Reducing Radiation-Induced False Counts in an...

Surface Defect Inspection With Large Particle Monitoring And Laser...

System and Method for Reducing Radiation-Induced False Counts in an...

TDI Sensor in a Darkfield System

Wafer Inspection

Method and Apparatus for Producing and Measuring Dynamically Focuse...

Scanning Inspection System With Angular Correction

Method and System for Tilt and Height Control of a Substrate Surfac...

Monitoring Incident Beam Position in a Wafer Inspection System

Laser with Integrated Multi Line or Scanning Beam Capability

Extended Defect Sizing Range for Wafer Inspection

Wafer Inspection

Extending the lifetime of a Deep UV laser in a Wafer Inspection tool

Method and apparatus for producing and Measuring dynamically focuss...

SYSTEMS, CIRCUITS AND METHODS FOR REDUCING THERMAL DAMAGE AND EXTEN...

SYSTEMS, CIRCUITS AND METHODS FOR EXTENDING THE DETECTION RANGE OF...

Inspection Systems and Methods for Extending the Detection Range of...

Systems, circuits and methods for extending the detection range of...

Systems, circuits and methods for reducing thermal damage and exten...

Systems, circuits and methods for extending the detection range of...