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Andras G. Major
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Oberkochen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method and arrangement for determining the heating condition of a m...
Patent number
10,161,808
Issue date
Dec 25, 2018
Carl Zeiss SMT GmbH
Peter Vogt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical system for a microlithographic projection exposure apparatu...
Patent number
9,946,161
Issue date
Apr 17, 2018
Carl Zeiss SMT GmbH
Ingo Saenger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
Patent number
9,897,925
Issue date
Feb 20, 2018
Carl Zeiss SMT GmbH
Stefan Xalter
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device for guiding electromagnetic radiation into a projection expo...
Patent number
9,310,701
Issue date
Apr 12, 2016
Carl Zeiss SMT GmbH
Andras G. Major
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
Patent number
9,239,229
Issue date
Jan 19, 2016
Carl Zeiss SMT GmbH
Stefan Xalter
G01 - MEASURING TESTING
Information
Patent Grant
Microlithographic projection exposure apparatus
Patent number
9,052,606
Issue date
Jun 9, 2015
Carl Zeiss SMT GmbH
Andras G. Major
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
Patent number
9,019,475
Issue date
Apr 28, 2015
Carl Zeiss SMT GmbH
Stefan Xalter
G01 - MEASURING TESTING
Information
Patent Grant
Illumination system of a microlithographic projection exposure appa...
Patent number
9,013,680
Issue date
Apr 21, 2015
Carl Zeiss SMT GmbH
Damian Fiolka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
Patent number
9,013,684
Issue date
Apr 21, 2015
Carl Zeiss SMT GmbH
Stefan Xalter
G01 - MEASURING TESTING
Information
Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
Patent number
9,001,309
Issue date
Apr 7, 2015
Carl Zeiss SMT GmbH
Stefan Xalter
G01 - MEASURING TESTING
Information
Patent Grant
Microlithographic projection exposure apparatus
Patent number
8,854,604
Issue date
Oct 7, 2014
Carl Zeiss SMT GmbH
Markus Deguenther
G02 - OPTICS
Information
Patent Grant
Illumination system of a microlithographic projection exposure appa...
Patent number
8,773,639
Issue date
Jul 8, 2014
Carl Zeiss SMT GmbH
Markus Deguenther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
Patent number
8,339,577
Issue date
Dec 25, 2012
Carl Zeiss SMT GmbH
Stefan Xalter
G01 - MEASURING TESTING
Information
Patent Grant
Illumination system for illuminating a mask in a microlithographic...
Patent number
8,164,046
Issue date
Apr 24, 2012
Carl Zeiss SMT GmbH
Andras G. Major
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system of a microlithographic projection exposure appa...
Patent number
7,782,443
Issue date
Aug 24, 2010
Carl Zeiss SMT AG
Damian Fiolka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
Publication number
20180246415
Publication date
Aug 30, 2018
Carl Zeiss SMT GMBH
Stefan Xalter
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
Publication number
20160266502
Publication date
Sep 15, 2016
Carl Zeiss SMT GMBH
Stefan Xalter
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
Publication number
20150300807
Publication date
Oct 22, 2015
Carl Zeiss SMT GMBH
Stefan Xalter
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
Publication number
20140233006
Publication date
Aug 21, 2014
Stefan Xalter
G02 - OPTICS
Information
Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
Publication number
20140226141
Publication date
Aug 14, 2014
Carl Zeiss SMT GMBH
Stefan Xalter
G02 - OPTICS
Information
Patent Application
Method and arrangement for determining the heating condition of a m...
Publication number
20130230073
Publication date
Sep 5, 2013
Peter Vogt
G02 - OPTICS
Information
Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Publication number
20130077074
Publication date
Mar 28, 2013
Carl Zeiss SMT GMBH
Andras G. Major
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATU...
Publication number
20130077077
Publication date
Mar 28, 2013
Carl Zeiss SMT GMBH
Ingo Saenger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
Publication number
20120293784
Publication date
Nov 22, 2012
Carl Zeiss SMT GMBH
Stefan Xalter
G02 - OPTICS
Information
Patent Application
DEVICE FOR GUIDING ELECTROMAGNETIC RADIATION INTO A PROJECTION EXPO...
Publication number
20120212720
Publication date
Aug 23, 2012
Carl Zeiss SMT GMBH
Andras G. Major
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ASSEMBLY FOR PROJECTION LITHOGRAPHY
Publication number
20120127440
Publication date
May 24, 2012
Carl Zeiss SMT GMBH
Andras G. Major
G01 - MEASURING TESTING
Information
Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Publication number
20120002185
Publication date
Jan 5, 2012
Carl Zeiss SMT GMBH
Markus Deguenther
G02 - OPTICS
Information
Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
Publication number
20110012010
Publication date
Jan 20, 2011
Carl Zeiss SMT AG
Andras G. Major
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLOTHOGRAPHIC PROJECTION EXPOSURE APPA...
Publication number
20100277708
Publication date
Nov 4, 2010
Carl Zeiss SMT AG
Damian Fiolka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLOTHOGRAPHIC PROJECTION EXPOSURE APPA...
Publication number
20100157268
Publication date
Jun 24, 2010
Carl Zeiss SMT AG
Damian Fiolka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
Publication number
20100103400
Publication date
Apr 29, 2010
Carl Zeiss SMT AG
Markus Deguenther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
Publication number
20100039629
Publication date
Feb 18, 2010
Carl Zeiss SMT AG
Stefan Xalter
G02 - OPTICS