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Andre Cardoso
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Laurel, MD, US
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last 30 patents
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Patent Grant
Optimized optical system design for endpoint detection
Patent number
6,547,458
Issue date
Apr 15, 2003
Axcelis Technologies, Inc.
Alan C. Janos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for detecting an endpoint for an oxygen free plasma process
Patent number
6,492,186
Issue date
Dec 10, 2002
Eaton Corporation
Qingyan Han
G01 - MEASURING TESTING
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Patent Grant
Zone controlled radiant heating system utilizing focused reflector
Patent number
6,259,072
Issue date
Jul 10, 2001
Axcelis Technologies, Inc.
David W. Kinnard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature probe and measurement method for low pressure process
Patent number
6,110,288
Issue date
Aug 29, 2000
Eaton Corporation
Joel Penelon
G01 - MEASURING TESTING
Information
Patent Grant
Radiant heating apparatus and method
Patent number
6,023,555
Issue date
Feb 8, 2000
Eaton Corporation
Joel Penelon
H01 - BASIC ELECTRIC ELEMENTS