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Andre Matthias PRINZ
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Dueren, DE
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last 30 patents
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Patent Grant
Arrangement and method for cooling a plasma-based radiation source
Patent number
9,202,659
Issue date
Dec 1, 2015
Ushio Denki Kabushiki Kaisha
Gota Niimi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
ARRANGEMENT AND METHOD FOR COOLING A PLASMA-BASED RADIATION SOURCE
Publication number
20150108365
Publication date
Apr 23, 2015
Ushio Denki Kabushiki Kaisha
Gota NIIMI
H01 - BASIC ELECTRIC ELEMENTS