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Andre Roeth
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Dresden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Capacitive microelectromechanical device and method for forming a c...
Patent number
12,332,271
Issue date
Jun 17, 2025
Infineon Technologies AG
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of generating a germanium structure and optical device compr...
Patent number
11,594,654
Issue date
Feb 28, 2023
Infineon Technologies AG
Andre Roeth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitive microelectromechanical device and method for forming a c...
Patent number
11,422,151
Issue date
Aug 23, 2022
Infineon Technologies AG
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Producing a buried cavity in a semiconductor substrate
Patent number
11,393,714
Issue date
Jul 19, 2022
Infineon Technologies AG
Andre Roeth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microelectromechanical device, method for manufacturing a microelec...
Patent number
11,078,072
Issue date
Aug 3, 2021
Infineon Technologies Dresden GmbH & Co. KG
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stressed decoupled micro-electro-mechanical system sensor
Patent number
10,870,575
Issue date
Dec 22, 2020
Infineon Technologies Dresden GmbH & Co. KG
Horst Theuss
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive microelectromechanical device and method for forming a c...
Patent number
10,684,306
Issue date
Jun 16, 2020
Infineon Technologies AG
Steffen Bieselt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical device, method for manufacturing a microelec...
Patent number
10,683,203
Issue date
Jun 16, 2020
Infineon Technologies Dresden GmbH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated semiconductor device and manufacturing method
Patent number
10,544,037
Issue date
Jan 28, 2020
Infineon Technologies Dresden GmbH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pressure sensor device and manufacturing method
Patent number
10,386,255
Issue date
Aug 20, 2019
Infineon Technologies Dresden GmbH
Thoralf Kautzsch
G01 - MEASURING TESTING
Information
Patent Grant
Sensor structures, systems and methods with improved integration an...
Patent number
10,060,816
Issue date
Aug 28, 2018
Infineon Technologies AG
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated semiconductor device and manufacturing method
Patent number
9,896,329
Issue date
Feb 20, 2018
Infineon Technologies Dresden GmbH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A C...
Publication number
20220326275
Publication date
Oct 13, 2022
INFINEON TECHNOLOGIES AG
Thoralf KAUTZSCH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF GENERATING A GERMANIUM STRUCTURE AND OPTICAL DEVICE COMPR...
Publication number
20220069156
Publication date
Mar 3, 2022
INFINEON TECHNOLOGIES AG
Andre Roeth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRODUCING A BURIED CAVITY IN A SEMICONDUCTOR SUBSTRATE
Publication number
20210013087
Publication date
Jan 14, 2021
INFINEON TECHNOLOGIES AG
Andre ROETH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A C...
Publication number
20200300886
Publication date
Sep 24, 2020
INFINEON TECHNOLOGIES AG
Thoralf KAUTZSCH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL DEVICE, METHOD FOR MANUFACTURING A MICROELE...
Publication number
20200290867
Publication date
Sep 17, 2020
Infineon Technologies Dresden GmbH & Co. KG
Thoralf KAUTZSCH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRESSED DECOUPLED MICRO-ELECTRO-MECHANICAL SYSTEM SENSOR
Publication number
20200002159
Publication date
Jan 2, 2020
Infineon Technologies Dresden GmbH & Co. KG
Horst THEUSS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL DEVICE, METHOD FOR MANUFACTURING A MICROELEC...
Publication number
20180297838
Publication date
Oct 18, 2018
INFINEON TECHNOLOGIES DRESDEN GMBH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD
Publication number
20180155188
Publication date
Jun 7, 2018
INFINEON TECHNOLOGIES DRESDEN GMBH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRESSURE SENSOR DEVICE AND MANUFACTURING METHOD
Publication number
20180017456
Publication date
Jan 18, 2018
INFINEON TECHNOLOGIES DRESDEN GMBH
Thoralf Kautzsch
G01 - MEASURING TESTING
Information
Patent Application
SENSOR STRUCTURES, SYSTEMS AND METHODS WITH IMPROVED INTEGRATION AN...
Publication number
20170089790
Publication date
Mar 30, 2017
INFINEON TECHNOLOGIES DRESDEN GMBH
Thoralf Kautzsch
G01 - MEASURING TESTING
Information
Patent Application
INTEGRATED SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD
Publication number
20170015546
Publication date
Jan 19, 2017
INFINEON TECHNOLOGIES DRESDEN GMBH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A C...
Publication number
20170010301
Publication date
Jan 12, 2017
INFINEON TECHNOLOGIES AG
Steffen BIESELT
G01 - MEASURING TESTING
Information
Patent Application
SYSTEMS AND METHODS FOR HORIZONTAL INTEGRATION OF ACCELERATION SENS...
Publication number
20160185594
Publication date
Jun 30, 2016
INFINEON TECHNOLOGIES DRESDEN GMBH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY