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Andrea Schilp
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Schwaebisch, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Device and method for etching a substrate using an inductively coup...
Patent number
7,811,941
Issue date
Oct 12, 2010
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching equipment
Patent number
7,648,611
Issue date
Jan 19, 2010
Robert Bosch GmbH
Franz Laermer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removing defects from silicon bodies by a selective etch...
Patent number
7,201,852
Issue date
Apr 10, 2007
Robert Bosch GmbH
Richard Spitz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for plasma etching of silicon
Patent number
7,166,536
Issue date
Jan 23, 2007
Robert Bosch GmbH
Franz Laermer
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Device and method for etching a substrate by using an inductively c...
Patent number
7,094,706
Issue date
Aug 22, 2006
Robert Bosch GmbH
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for processing silicon using etching processes
Patent number
7,052,623
Issue date
May 30, 2006
Robert Bosch GmbH
Volker Becker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Plasma etching method having pulsed substrate electrode power
Patent number
6,926,844
Issue date
Aug 9, 2005
Robert Bosch GmbH
Franz Laermer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for determining the lateral undercut of a structu...
Patent number
6,911,348
Issue date
Jun 28, 2005
Robert Bosch GmbH
Volker Becker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device and method for etching a substrate using an inductively coup...
Patent number
6,899,817
Issue date
May 31, 2005
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for anisotropic plasma etching of semiconductors
Patent number
6,720,268
Issue date
Apr 13, 2004
Robert Bosch GmbH
Franz Laermer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
DEVICE AND METHOD FOR THE HIGH-FREQUENCY ETCHING OF A SUBSTRATE USI...
Patent number
6,720,273
Issue date
Apr 13, 2004
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for etching a substrate by using an inductively c...
Patent number
6,709,546
Issue date
Mar 23, 2004
Robert Bosch GmbH
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing micromechanical surface structures by vapor...
Patent number
6,558,559
Issue date
May 6, 2003
Robert Bosch GmbH
Volker Becker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Plasma etching installation
Patent number
6,531,031
Issue date
Mar 11, 2003
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of anisotropic etching of silicon
Patent number
6,531,068
Issue date
Mar 11, 2003
Robert Bosch GmbH
Franz Laermer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structural body having a stochastic surface patterning as well as a...
Patent number
6,515,491
Issue date
Feb 4, 2003
Robert Bosch GmbH
Michael Kupzig
G01 - MEASURING TESTING
Information
Patent Grant
Method for applying a protecting lacquer on a wafer
Patent number
6,340,644
Issue date
Jan 22, 2002
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for measuring a physical variable
Patent number
6,324,910
Issue date
Dec 4, 2001
Robert Bosch GmbH
Karsten Funk
G01 - MEASURING TESTING
Information
Patent Grant
Anisotropic, fluorine-based plasma etching method for silicon
Patent number
6,303,512
Issue date
Oct 16, 2001
Robert Bosch GmbH
Franz Laermer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for anisotropic etching of silicon
Patent number
6,284,148
Issue date
Sep 4, 2001
Robert Bosch GmbH
Franz Laermer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for producing a speed of rotation coriolis sensor
Patent number
6,214,243
Issue date
Apr 10, 2001
Robert Bosch GmbH
Horst Muenzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for anisotropic etching of substrates
Patent number
6,214,161
Issue date
Apr 10, 2001
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for detecting the transition between different materials in...
Patent number
6,200,822
Issue date
Mar 13, 2001
Robert Bosch GmbH
Volker Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for anisotropic plasma etching of different substrates
Patent number
6,127,273
Issue date
Oct 3, 2000
Robert Bosch GmbH
Franz Laermer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical acceleration or coriolis rotation-rate sensor
Patent number
6,062,082
Issue date
May 16, 2000
Robert Bosch GmbH
Gero Guenther
G01 - MEASURING TESTING
Information
Patent Grant
Method for manufacturing a sensor
Patent number
6,030,850
Issue date
Feb 29, 2000
Robert Bosch GmbH
Juergen Kurle
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Force sensor having an adjustable distance between an operating poi...
Patent number
6,012,341
Issue date
Jan 11, 2000
Robert Bosch GmbH
Karsten Funk
G01 - MEASURING TESTING
Information
Patent Grant
Process for making micromechanical structures
Patent number
6,008,138
Issue date
Dec 28, 1999
Robert Bosch GmbH
Franz Laermer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a force sensor
Patent number
5,804,457
Issue date
Sep 8, 1998
Gerhard Benz
G01 - MEASURING TESTING
Information
Patent Grant
Sensor and method for manufacturing a sensor
Patent number
5,756,901
Issue date
May 26, 1998
Robert Bosch GmbH
Juergen Kurle
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Device and method for etching a substrate by using an inductively c...
Publication number
20040149388
Publication date
Aug 5, 2004
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ANISOTROPIC ETCHING OF SILICON
Publication number
20020144974
Publication date
Oct 10, 2002
FRANZ LAERMER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and method for etching a substrate by using an inductively c...
Publication number
20020046987
Publication date
Apr 25, 2002
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS