Andrea Urban

Person

Stuttgart, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing a micromechanical structure and micromecha...
- Patent number 11,787,687
- Issue date Oct 17, 2023
- Robert Bosch GmbH
- Andrea Urban
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a structured surface
- Patent number 9,233,843
- Issue date Jan 12, 2016
- Robert Bosch GmbH
- Andrea Urban
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical component, and micromech...
- Patent number 8,481,427
- Issue date Jul 9, 2013
- Robert Bosch GmbH
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma system and method for anisotropically etching structures int...
- Patent number 7,855,150
- Issue date Dec 21, 2010
- Robert Bosch GmbH
- Franz Laermer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching structures into an etching body using a plasma
- Patent number 7,785,486
- Issue date Aug 31, 2010
- Robert Bosch GmbH
- Andrea Urban
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Layer and system with a silicon layer and a passivation layer, meth...
- Patent number 7,642,545
- Issue date Jan 5, 2010
- Robert Bosch GmbH
- Andrea Urban
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Holding device, in particular for fixing a semiconductor wafer in a...
- Patent number 7,149,070
- Issue date Dec 12, 2006
- Robert Bosch GmbH
- Klaus Breitschwerdt
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE AND MICROMECHA...
- Publication number 20210331916
- Publication date Oct 28, 2021
- ROBERT BOSCH GmbH
- Andrea Urban
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A STRUCTURED SURFACE
- Publication number 20150140717
- Publication date May 21, 2015
- ROBERT BOSCH GmbH
- Andrea URBAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing a Micromechanical Component, and Micromec...
- Publication number 20100260974
- Publication date Oct 14, 2010
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Plasma system and method for anisotropically etching structures int...
- Publication number 20060141794
- Publication date Jun 29, 2006
- Franz Laermer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrical system, especially a microelectronic or microelectromech...
- Publication number 20060097388
- Publication date May 11, 2006
- Klaus Breitschwerdt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Layer system with a silicon layer and a passivation layer, method f...
- Publication number 20060068510
- Publication date Mar 30, 2006
- Andrea Urban
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Retaining device, especially for fixing a semiconductor wafer in a...
- Publication number 20050083634
- Publication date Apr 21, 2005
- Kalus Breitschwerdt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of etching structures into an etching body using a plasma
- Publication number 20040124177
- Publication date Jul 1, 2004
- Andrea Urban
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Plasma etching equipment
- Publication number 20040014325
- Publication date Jan 22, 2004
- Franz Laermer
- H01 - BASIC ELECTRIC ELEMENTS

Andrea Urban

Person

Patents Grantslast 30 patents

Method for manufacturing a micromechanical structure and micromecha...

Method for manufacturing a structured surface

Method for manufacturing a micromechanical component, and micromech...

Plasma system and method for anisotropically etching structures int...

Method of etching structures into an etching body using a plasma

Layer and system with a silicon layer and a passivation layer, meth...

Holding device, in particular for fixing a semiconductor wafer in a...

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE AND MICROMECHA...

METHOD FOR MANUFACTURING A STRUCTURED SURFACE

Method for Manufacturing a Micromechanical Component, and Micromec...

Plasma system and method for anisotropically etching structures int...

Electrical system, especially a microelectronic or microelectromech...

Layer system with a silicon layer and a passivation layer, method f...

Retaining device, especially for fixing a semiconductor wafer in a...

Method of etching structures into an etching body using a plasma

Plasma etching equipment