Andreas Bertele

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Steinheim, DE

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Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus for semiconductor lithography includi...
- Patent number 9,030,644
- Issue date May 12, 2015
- Carl Zeiss SMT GmbH
- Benjamin Sigel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Force actuator
- Patent number 8,528,461
- Issue date Sep 10, 2013
- Carl Zeiss SMT GmbH
- Andreas Bertele
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDI...
- Publication number 20190121238
- Publication date Apr 25, 2019
- Carl Zeiss SMT GMBH
- Benjamin Sigel
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDI...
- Publication number 20150316855
- Publication date Nov 5, 2015
- Carl Zeiss SMT GMBH
- Benjamin Sigel
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDI...
- Publication number 20110317140
- Publication date Dec 29, 2011
- Carl Zeiss SMT GMBH
- Benjamin Sigel
- G02 - OPTICS
Information Patent Application
PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD
- Publication number 20100128367
- Publication date May 27, 2010
- Carl Zeiss SMT AG
- Mariella Beckenbach
- G02 - OPTICS
Information Patent Application
Force Actuator
- Publication number 20090091720
- Publication date Apr 9, 2009
- Carl Zeiss SMT AG
- Andreas Bertele
- G02 - OPTICS