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Andreas B.G. Ariens
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Utrecht, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Object positioning method for a lithographic projection apparatus
Patent number
7,397,940
Issue date
Jul 8, 2008
ASML Netherlands B.V.
Marcus J. H. Willems van Dijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Position measuring device, position measuring system, lithographic...
Patent number
6,875,992
Issue date
Apr 5, 2005
ASML Netherlands B.V.
Thomas J. M. Castenmiller
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Crash prevention in positioning apparatus for use in lithographic p...
Patent number
6,498,350
Issue date
Dec 24, 2002
ASML Netherlands B.V.
Yim Bun P. Kwan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Position measuring device, position measuring system, lithographic...
Publication number
20040211921
Publication date
Oct 28, 2004
ASML NETHERLANDS B.V.
Thomas J.M. Castenmiller
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Object positioning method for a lithographic projection apparatus
Publication number
20010014170
Publication date
Aug 16, 2001
Marcus J.H. Willems van Dijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Position detection system for use in lithographic apparatus
Publication number
20010011712
Publication date
Aug 9, 2001
Thomas J.M. Castenmiller
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Crash prevention in positioning apparatus for use in lithographic p...
Publication number
20010004105
Publication date
Jun 21, 2001
Yim Bun P. Kwan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY