Andreas BIERMANNS-FOETH

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Overath, DE

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Patents Grantslast 30 patents

Information Patent Grant
Microscopic system for testing structures and defects on EUV lithog...
- Patent number 11,615,897
- Issue date Mar 28, 2023
- RI Research Institute GmbH
- Rainer Lebert
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
MICROSCOPIC SYSTEM FOR TESTING STRUCTURES AND DEFECTS ON EUV LITHOG...
- Publication number 20220392660
- Publication date Dec 8, 2022
- RI Research Instruments GmbH
- Rainer LEBERT
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING