Andreas Birkner

Person

Jena, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for processing substrates, in particular wafers, masks or fl...
- Patent number 12,063,745
- Issue date Aug 13, 2024
- Integrated Dynamics Engineering GmbH
- Andreas Birkner
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Maintenance apparatus
- Patent number 10,322,919
- Issue date Jun 18, 2019
- Integrated Dynamics Engineering GmbH
- Andreas Birkner
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Device and method for evaluating defects in the edge area of a wafe...
- Patent number 8,089,622
- Issue date Jan 3, 2012
- Vistec Semiconductor Systems GmbH
- Andreas Birkner
- G01 - MEASURING TESTING
Information Patent Grant
Method and arrangement for transporting and inspecting semiconducto...
- Patent number 7,028,565
- Issue date Apr 18, 2006
- Leica Microsystems Jena GmbH
- Andreas Birkner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate conveying module and system made up of substrate conveyin...
- Patent number 6,962,471
- Issue date Nov 8, 2005
- Leica Microsystems Jena GmbH
- Andreas Birkner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrangement and method for the identification of substrates
- Patent number 6,845,174
- Issue date Jan 18, 2005
- Leica Microsystems Jena GmbH
- Dominik Grau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and arrangement for transporting and inspecting semiconducto...
- Patent number 6,789,436
- Issue date Sep 14, 2004
- Leica Microsystems Jena GmbH
- Andreas Birkner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for manipulating an object for loading and unloading a clean...
- Patent number 6,736,582
- Issue date May 18, 2004
- Brooks Automation, Inc.
- Andreas Mages
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and arrangement for transporting and inspecting semiconducto...
- Patent number 6,553,850
- Issue date Apr 29, 2003
- Leica Microsystems Jena GmbH
- Andreas Birkner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for transferring a transport object between two end positions
- Patent number 5,636,724
- Issue date Jun 10, 1997
- Jenoptik Technologie GmbH
- Werner Scheler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for indexing magazine compartments and wafer-shaped objects...
- Patent number 5,605,428
- Issue date Feb 25, 1997
- Jenoptik GmbH
- Andreas Birkner
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PROCESSING SUBSTRATES, IN PARTICULAR WAFERS, MASKS OR FL...
- Publication number 20240357784
- Publication date Oct 24, 2024
- INTEGRATED DYNAMICS ENGINEERING GMBH
- Andreas BIRKNER
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEVICE AND METHOD FOR IMAGING AN OBJECT IN AT LEAST TWO VIEWS
- Publication number 20230395417
- Publication date Dec 7, 2023
- INTEGRATED DYNAMICS ENGINEERING GMBH
- Andreas Birkner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for processing substrates, in particular wafers, masks or fl...
- Publication number 20210352835
- Publication date Nov 11, 2021
- INTEGRATED DYNAMICS ENGINEERING GMBH
- Andreas BIRKNER
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SERVICE CART
- Publication number 20180155126
- Publication date Jun 7, 2018
- INTEGRATED DYNAMICS ENGINEERING GMBH
- Ingo WEISKE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Maintenance Apparatus
- Publication number 20170267504
- Publication date Sep 21, 2017
- INTEGRATED DYNAMICS ENGINEERING GMBH
- Andreas BIRKNER
- B66 - HOISTING LIFTING HAULING
Information Patent Application
SYSTEM AND METHOD FOR COOLING A COMPUTER SYSTEM
- Publication number 20130205822
- Publication date Aug 15, 2013
- Peter Heiland
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR COOLING A PROCESSING SYSTEM
- Publication number 20130050931
- Publication date Feb 28, 2013
- Peter Heiland
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DEVICE AND METHOD FOR EVALUATING DEFECTS IN THE EDGE AREA OF A WAFE...
- Publication number 20080232672
- Publication date Sep 25, 2008
- Vistec Semiconductor Systems GmbH
- Andreas Birkner
- G01 - MEASURING TESTING
Information Patent Application
Method and arrangement for transporting and inspecting semiconducto...
- Publication number 20040149055
- Publication date Aug 5, 2004
- LEICA MICROSYSTEMS JENA GmbH
- Andreas Birkner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and arrangement for transporting and inspecting semiconducto...
- Publication number 20030140716
- Publication date Jul 31, 2003
- LEICA MICROSYSTEMS JENA GmbH
- Andreas Birkner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Arrangement and method for the identification of substrates
- Publication number 20020097905
- Publication date Jul 25, 2002
- LEICA MICROSYSTEMS JENA GmbH
- Dominik Grau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and arrangement for transporting and inspecting semiconducto...
- Publication number 20020095999
- Publication date Jul 25, 2002
- LEICA MICROSYSTEMS JENA GmbH
- Andreas Birkner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate conveying module and system made up of substrate conveyin...
- Publication number 20020051698
- Publication date May 2, 2002
- Andreas Birkner
- H01 - BASIC ELECTRIC ELEMENTS

Andreas Birkner

Person

Patents Grantslast 30 patents

Method for processing substrates, in particular wafers, masks or fl...

Maintenance apparatus

Device and method for evaluating defects in the edge area of a wafe...

Method and arrangement for transporting and inspecting semiconducto...

Substrate conveying module and system made up of substrate conveyin...

Arrangement and method for the identification of substrates

Method and arrangement for transporting and inspecting semiconducto...

Device for manipulating an object for loading and unloading a clean...

Method and arrangement for transporting and inspecting semiconducto...

Device for transferring a transport object between two end positions

Device for indexing magazine compartments and wafer-shaped objects...

Patents Applicationslast 30 patents

METHOD FOR PROCESSING SUBSTRATES, IN PARTICULAR WAFERS, MASKS OR FL...

DEVICE AND METHOD FOR IMAGING AN OBJECT IN AT LEAST TWO VIEWS

Method for processing substrates, in particular wafers, masks or fl...

SERVICE CART

Maintenance Apparatus

SYSTEM AND METHOD FOR COOLING A COMPUTER SYSTEM

SYSTEM AND METHOD FOR COOLING A PROCESSING SYSTEM

DEVICE AND METHOD FOR EVALUATING DEFECTS IN THE EDGE AREA OF A WAFE...

Method and arrangement for transporting and inspecting semiconducto...

Method and arrangement for transporting and inspecting semiconducto...

Arrangement and method for the identification of substrates

Method and arrangement for transporting and inspecting semiconducto...

Substrate conveying module and system made up of substrate conveyin...