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Andreas DORSEL
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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method for examining a wafer with regard to a contamination limit a...
Patent number
8,288,064
Issue date
Oct 16, 2012
Carl Zeiss SMT GmbH
Andreas Dorsel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for examining a wafer with regard to a contamination limit a...
Patent number
7,955,767
Issue date
Jun 7, 2011
Carl Zeiss SMT GmbH
Andreas Dorsel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging system for a microlithographical projection light system
Patent number
7,719,658
Issue date
May 18, 2010
Carl Zeiss SMT AG
Andreas Dorsel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiating and receiving arrangement for a fiber-optic sensor having...
Patent number
5,159,190
Issue date
Oct 27, 1992
Carl-Zeiss-Stiftung
Gerhard Hohberg
G02 - OPTICS
Information
Patent Grant
Optical switch
Patent number
5,077,813
Issue date
Dec 31, 1991
Carl-Zeiss-Stiftung
Andreas Dorsel
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR EXAMINING A WAFER WITH REGARD TO A CONTAMINATION LIMIT A...
Publication number
20110236809
Publication date
Sep 29, 2011
Carl Zeiss SMT GMBH
Andreas DORSEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR EXAMINING A WAFER WITH REGARD TO A CONTAMINATION LIMIT A...
Publication number
20100183962
Publication date
Jul 22, 2010
Carl Zeiss SMT AG
Andreas DORSEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Imaging System for a Microlithographical Projection Light System
Publication number
20070285637
Publication date
Dec 13, 2007
Carl Zeiss SMT AG
Andreas Dorsel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY