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Andreas FUCHS
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Meerbusch, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Metrology method, target and substrate
Patent number
11,428,521
Issue date
Aug 30, 2022
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G01 - MEASURING TESTING
Information
Patent Grant
Metrology method, target and substrate
Patent number
11,204,239
Issue date
Dec 21, 2021
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method, target and substrate
Patent number
10,718,604
Issue date
Jul 21, 2020
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method, target and substrate
Patent number
10,386,176
Issue date
Aug 20, 2019
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring asymmetry, inspection apparatus, lithographic s...
Patent number
9,786,044
Issue date
Oct 10, 2017
ASML Netherlands B.V.
Andreas Fuchs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
Patent number
9,594,310
Issue date
Mar 14, 2017
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection method and apparatus, lithographic apparatus, lithograph...
Patent number
9,594,311
Issue date
Mar 14, 2017
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection methods, inspection apparatuses, and lithographic appara...
Patent number
9,470,986
Issue date
Oct 18, 2016
ASML Netherlands B.V.
Andreas Fuchs
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus and method for measuring a property of a subst...
Patent number
9,235,141
Issue date
Jan 12, 2016
ASML Netherlands B.V.
Maurits Van Der Schaar
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for determining an overlay error
Patent number
8,908,147
Issue date
Dec 9, 2014
ASML Netherlands B.V.
Arie Jeffrey Den Boef
A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information
Patent Grant
Apparatus and method of measuring a property of a substrate
Patent number
8,786,825
Issue date
Jul 22, 2014
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G01 - MEASURING TESTING
Information
Patent Grant
Inspection method and apparatus, and corresponding lithographic app...
Patent number
8,749,786
Issue date
Jun 10, 2014
ASML Netherlands B.V.
Andreas Fuchs
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus for lithography
Patent number
8,724,087
Issue date
May 13, 2014
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for inspecting a substrate
Patent number
8,665,417
Issue date
Mar 4, 2014
ASML Netherlands B.V.
Andreas Fuchs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20230016664
Publication date
Jan 19, 2023
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20220057192
Publication date
Feb 24, 2022
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20200348125
Publication date
Nov 5, 2020
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20190346256
Publication date
Nov 14, 2019
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MEASURING ASYMMETRY, INSPECTION APPARATUS, LITHOGRAPHIC S...
Publication number
20160180517
Publication date
Jun 23, 2016
ASML NETHERLANDS B.V.
Andreas FUCHS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20160061589
Publication date
Mar 3, 2016
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
Publication number
20140327908
Publication date
Nov 6, 2014
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G01 - MEASURING TESTING
Information
Patent Application
Inspection Methods, Inspection Apparatuses, and Lithographic Appara...
Publication number
20140176955
Publication date
Jun 26, 2014
ASML NETHERLANDS B.V.
Andreas FUCHS
G01 - MEASURING TESTING
Information
Patent Application
Inspection Apparatus and Method, Lithographic Apparatus and Lithogr...
Publication number
20120033193
Publication date
Feb 9, 2012
ASML NETHERLANDS B.V.
Maurits VAN DER SCHAAR
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatus for Determining an Overlay Error
Publication number
20120013881
Publication date
Jan 19, 2012
ASML NETHERLANDS B.V.
Arie Jeffrey Den Boef
A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information
Patent Application
Apparatus and Method for Inspecting a Substrate
Publication number
20110255066
Publication date
Oct 20, 2011
ASML NETHERLANDS B.V.
Andreas Fuchs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Inspection Apparatus for Lithography
Publication number
20110141444
Publication date
Jun 16, 2011
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G01 - MEASURING TESTING
Information
Patent Application
Inspection Method and Apparatus, and Corresponding Lithographic App...
Publication number
20110134419
Publication date
Jun 9, 2011
ASML NETHERLANDS B.V.
Andreas FUCHS
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and Method of Measuring a Property of a Substrate
Publication number
20110102753
Publication date
May 5, 2011
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G01 - MEASURING TESTING