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Andreas GEHNER
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Dresden, DE
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last 30 patents
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Patent Grant
MMS, MMS array, MEMS actuator and method for providing an MMS
Patent number
11,459,229
Issue date
Oct 4, 2022
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Peter Duerr
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
MMS, MMS ARRAY, MEMS ACTUATOR AND METHOD FOR PROVIDING AN MMS
Publication number
20190345023
Publication date
Nov 14, 2019
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
Peter DUERR
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
METHOD AND DEVICE FOR LOCALLY DEFINED MACHINING ON THE SURFACES OF...
Publication number
20180117709
Publication date
May 3, 2018
Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
Andreas WETZIG
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR