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ANDREAS HAUKE
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NEU ULM, DE
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Patents Grants
last 30 patents
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Patent Grant
Gas driven rotating susceptor for rapid thermal processing (RTP) sy...
Patent number
6,449,428
Issue date
Sep 10, 2002
Mattson Technology Corp.
Helmut Aschner
C30 - CRYSTAL GROWTH
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Patent Grant
Rapid thermal processing (RTP) system with gas driven rotating subs...
Patent number
6,005,226
Issue date
Dec 21, 1999
Steag-RTP Systems
Helmut Aschner
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
GAS DRIVEN ROTATING SUSCEPTOR FOR RAPID THERMAL PROCESSING (RTP) SY...
Publication number
20010002948
Publication date
Jun 7, 2001
Rodney T. Hodgson
HELMUT ASCHNER
C30 - CRYSTAL GROWTH