Andreas Kadavanich

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Inductively coupled plasma source for plasma processing
- Patent number 9,653,264
- Issue date May 16, 2017
- Mattson Technology, Inc.
- Vladimir Nagorny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slotted electrostatic shield modification for improved etch and CVD...
- Patent number 8,413,604
- Issue date Apr 9, 2013
- Mattson Technology, Inc.
- Rene George
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for removal of photoresist in transistor fabricat...
- Patent number 7,799,685
- Issue date Sep 21, 2010
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slotted electrostatic shield modification for improved etch and CVD...
- Patent number 7,232,767
- Issue date Jun 19, 2007
- Mattson Technology, Inc.
- Rene George
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Inductively Coupled Plasma Source for Plasma Processing
- Publication number 20170243721
- Publication date Aug 24, 2017
- Mattson Technology, Inc.
- Vladimir Nagorny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLOTTED ELECTROSTATIC SHIELD MODIFICATION FOR IMPROVED ETCH AND CVD...
- Publication number 20130196510
- Publication date Aug 1, 2013
- Mattson Technology, Inc.
- Rene George
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED PLASMA SOURCE FOR PLASMA PROCESSING
- Publication number 20120152901
- Publication date Jun 21, 2012
- Mattson Technology, Inc.
- Vladimir Nagorny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Slotted Electrostatic Shield Modification for Improved Etch and CVD...
- Publication number 20070113979
- Publication date May 24, 2007
- Rene George
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and method for removal of photoresist in transistor fabricat...
- Publication number 20050112883
- Publication date May 26, 2005
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Slotted electrostatic shield modification for improved etch and CVD...
- Publication number 20040244691
- Publication date Dec 9, 2004
- Rene George
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Photoresist implant crust removal
- Publication number 20040084150
- Publication date May 6, 2004
- Rene George
- H01 - BASIC ELECTRIC ELEMENTS

Andreas Kadavanich

Person

Patents Grantslast 30 patents

Inductively coupled plasma source for plasma processing

Slotted electrostatic shield modification for improved etch and CVD...

System and method for removal of photoresist in transistor fabricat...

Slotted electrostatic shield modification for improved etch and CVD...

Patents Applicationslast 30 patents

Inductively Coupled Plasma Source for Plasma Processing

SLOTTED ELECTROSTATIC SHIELD MODIFICATION FOR IMPROVED ETCH AND CVD...

INDUCTIVELY COUPLED PLASMA SOURCE FOR PLASMA PROCESSING

Slotted Electrostatic Shield Modification for Improved Etch and CVD...

System and method for removal of photoresist in transistor fabricat...

Slotted electrostatic shield modification for improved etch and CVD...

Photoresist implant crust removal