Andreas Kirchner

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Lorch, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for distortion correction in a microlithographic projection...
- Patent number 7,605,905
- Issue date Oct 20, 2009
- Carl Zeiss SMT AG
- Andreas Kirchner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for correcting astigmatism in a microlithography projection...
- Patent number 7,522,260
- Issue date Apr 21, 2009
- Carl Zeiss SMT AG
- Andreas Kirchner
- G02 - OPTICS
Information Patent Grant
Method for distortion correction in a microlithographic projection...
- Patent number 7,372,539
- Issue date May 13, 2008
- Carl Zeiss SMT AG
- Andreas Kirchner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method For Distortion Correction In A Microlithographic Projection...
- Publication number 20080278699
- Publication date Nov 13, 2008
- Carl Zeiss SMT AG
- Andreas Kirchner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for distortion correction in a microlithographic projection...
- Publication number 20040263810
- Publication date Dec 30, 2004
- Andreas Kirchner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY