Andreas Michel

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Eggenstein-Leopoldshafen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Process for producing microstructure components on a substrate
- Patent number 5,759,616
- Issue date Jun 2, 1998
- Kernforschungszentrum Karlsruhe GmbH
- Andreas Michel
- B81 - MICRO-STRUCTURAL TECHNOLOGY