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Andreas Ochse
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Oberkochen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Projection objective
Patent number
7,557,902
Issue date
Jul 7, 2009
Carl Zeiss SMT AG
Udo Dinger
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Optical component that includes a material having a thermal longitu...
Patent number
7,428,037
Issue date
Sep 23, 2008
Carl Zeiss SMT AG
Timo Laufer
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
COMPOSITE BODY
Publication number
20100284652
Publication date
Nov 11, 2010
Carl Zeiss SMT AG
Fraser Morrison
G02 - OPTICS
Information
Patent Application
Euv projection lens with mirrors made from material with differing...
Publication number
20070035814
Publication date
Feb 15, 2007
Udo Dinger
G02 - OPTICS
Information
Patent Application
Composite body
Publication number
20060192328
Publication date
Aug 31, 2006
Carl Zeiss SMT AG
Fraser Morrison
G02 - OPTICS
Information
Patent Application
Optical component that includes a material having a thermal longitu...
Publication number
20050207001
Publication date
Sep 22, 2005
Timo Laufer
G02 - OPTICS