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Andreas Pfeiffer
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Marzling, DE
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last 30 patents
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Patent Grant
Apparatus and method for detecting defects in wafer manufacturing
Patent number
8,532,364
Issue date
Sep 10, 2013
Texas Instruments Deutschland GmbH
Alexander Urban
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
APPARATUS AND METHOD FOR DETECTING DEFECTS IN WAFER MANUFACTURING
Publication number
20100208980
Publication date
Aug 19, 2010
Texas Instruments Deutschland GmbH
Alexander Urban
G01 - MEASURING TESTING