Andreas Raba

Person

Niederschoenenfeld, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical assembly, projection exposure apparatus and method
- Patent number 12,313,978
- Issue date May 27, 2025
- Carl Zeiss SMT GmbH
- Andreas Raba
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
MIRROR DEVICE, PROJECTION OBJECTIVE AND METHOD FOR MEASURING THE TE...
- Publication number 20250216801
- Publication date Jul 3, 2025
- Carl Zeiss SMT GMBH
- Andreas Raba
- G01 - MEASURING TESTING
Information Patent Application
MIRROR DEVICE, FOR EXAMPLE FOR A MICROLITHOGRAPHIC PROJECTION EXPOS...
- Publication number 20250216794
- Publication date Jul 3, 2025
- Carl Zeiss SMT GMBH
- Johannes LIPPERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT AND PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR...
- Publication number 20250130504
- Publication date Apr 24, 2025
- Carl Zeiss SMT GMBH
- Dieter Bader
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE-INSENSITIVE ACTUATOR AND DEFORMATION MIRROR
- Publication number 20250044711
- Publication date Feb 6, 2025
- Carl Zeiss SMT GMBH
- Andreas Raba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20240012334
- Publication date Jan 11, 2024
- Carl Zeiss SMT GMBH
- Markus Raab
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ASSEMBLY, METHOD FOR CONTROLLING AN OPTICAL ASSEMBLY, AND P...
- Publication number 20230176486
- Publication date Jun 8, 2023
- Carl Zeiss SMT GMBH
- Markus Raab
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ASSEMBLY, PROJECTION EXPOSURE APPARATUS AND METHOD
- Publication number 20220382165
- Publication date Dec 1, 2022
- Carl Zeiss SMT GMBH
- Andreas Raba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Andreas Raba

Person

Patents Grantslast 30 patents

Optical assembly, projection exposure apparatus and method

Patents Applicationslast 30 patents

MIRROR DEVICE, PROJECTION OBJECTIVE AND METHOD FOR MEASURING THE TE...

MIRROR DEVICE, FOR EXAMPLE FOR A MICROLITHOGRAPHIC PROJECTION EXPOS...

OPTICAL ELEMENT AND PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR...

TEMPERATURE-INSENSITIVE ACTUATOR AND DEFORMATION MIRROR

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY

OPTICAL ASSEMBLY, METHOD FOR CONTROLLING AN OPTICAL ASSEMBLY, AND P...

OPTICAL ASSEMBLY, PROJECTION EXPOSURE APPARATUS AND METHOD