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Andreas Roemer
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Dresden, DE
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Patents Grants
last 30 patents
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Patent Grant
Method of determining the endpoint of a planarization process
Patent number
6,932,674
Issue date
Aug 23, 2005
Infineon Technologies Aktientgesellschaft
Peter Lahnor
B24 - GRINDING POLISHING
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Patent Grant
Process and device for the abrasive machining of surfaces, in parti...
Patent number
6,858,449
Issue date
Feb 22, 2005
Infineon Technologies AG
Mark Hollatz
B24 - GRINDING POLISHING
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Patent Grant
Method of planarizing substrates
Patent number
6,827,635
Issue date
Dec 7, 2004
Infineon Technologies Aktiengesellschaft
Peter Lahnor
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
METHOD OF PLANARIZING SUBSTRATES
Publication number
20040185756
Publication date
Sep 23, 2004
Peter Lahnor
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF DETERMINING THE ENDPOINT OF A PLANARIZATION PROCESS
Publication number
20040176015
Publication date
Sep 9, 2004
Peter Lahnor
B24 - GRINDING POLISHING
Information
Patent Application
Process and device for the abrasive machining of surfaces, in parti...
Publication number
20020197872
Publication date
Dec 26, 2002
Mark Hollatz
B24 - GRINDING POLISHING