Andreas Schubert

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Niederrossla, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for producing resist profiled elements
- Patent number 7,880,152
- Issue date Feb 1, 2011
- Giesecke & Devrient GmbH
- Wittich Kaule
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Device and method for imaging a multiple particle beam on a substrate
- Patent number 7,332,730
- Issue date Feb 19, 2008
- Leica Microsystems Lithography GmbH
- Joachim Heinitz
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for forming a curved polyline on a radiation-s...
- Patent number 6,774,375
- Issue date Aug 10, 2004
- Leica Microsystems Lithography GmbH
- Rainer Plontke
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Device And Method For Producing Resist Profiled Elements
- Publication number 20080197295
- Publication date Aug 21, 2008
- VISTEC ELECTRON BEAM GMBH
- Wittich Kaule
- G11 - INFORMATION STORAGE
Information Patent Application
Device and method for imaging a multiple particle beam on a substrate
- Publication number 20060102853
- Publication date May 18, 2006
- Leica Microsystems Lithography GmbH
- Joachim Heinitz
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for forming a curved polyline on a radiation-s...
- Publication number 20010040221
- Publication date Nov 15, 2001
- Rainer Plontke
- B82 - NANO-TECHNOLOGY