Andreas SCHURING

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for in-die overlay control using FEOL dummy fill layer
- Patent number 10,115,621
- Issue date Oct 30, 2018
- GLOBALFOUNDRIES Inc.
- Peter Moll
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR IN-DIE OVERLAY CONTROL USING FEOL DUMMY FILL LAYER
- Publication number 20170330782
- Publication date Nov 16, 2017
- GLOBALFOUNDRIES INC.
- Peter MOLL
- H01 - BASIC ELECTRIC ELEMENTS