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Andreas Seifert
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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Mirror with a mirror carrier and projection exposure apparatus
Patent number
8,831,170
Issue date
Sep 9, 2014
Carl Zeiss SMT GmbH
Rutger Wevers
G02 - OPTICS
Information
Patent Grant
Focusing-device for the radiation from a light source
Patent number
7,871,171
Issue date
Jan 18, 2011
Carl Zeiss SMT AG
Martin Antoni
G02 - OPTICS
Information
Patent Grant
Faceted mirror apparatus
Patent number
7,802,891
Issue date
Sep 28, 2010
Carl Zeiss SMT AG
Andreas Seifert
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Focusing-device for the radiation from a light source
Patent number
7,410,265
Issue date
Aug 12, 2008
Carl Zeiss SMT AG
Martin Antoni
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Facet mirror having a number of mirror facets
Patent number
7,354,168
Issue date
Apr 8, 2008
Carl Zeiss SMT AG
Hubert Holderer
G02 - OPTICS
Information
Patent Grant
Method for the production of a facetted mirror
Patent number
7,246,909
Issue date
Jul 24, 2007
Carl Zeiss SMT AG
Andreas Seifert
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Facet mirror having a number of mirror facets
Patent number
7,090,362
Issue date
Aug 15, 2006
Carl Zeiss SMT AG
Hubert Holderer
G02 - OPTICS
Information
Patent Grant
Focusing-device for the radiation from a light source
Patent number
6,655,808
Issue date
Dec 2, 2003
Carl Zeiss SMT AG
Martin Antoni
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
FACETED MIRROR APPARATUS
Publication number
20090097142
Publication date
Apr 16, 2009
Andreas Seifert
G02 - OPTICS
Information
Patent Application
Focusing-device for the radiation from a light source
Publication number
20080297755
Publication date
Dec 4, 2008
Carl Zeiss SMT AG
Martin Antoni
G02 - OPTICS
Information
Patent Application
MIRROR WITH A MIRROR CARRIER AND PROJECTION EXPOSURE APPARATUS
Publication number
20080144202
Publication date
Jun 19, 2008
Carl Zeiss SMT AG
Rutger Wevers
G02 - OPTICS
Information
Patent Application
FACETED MIRROR APPARATUS
Publication number
20070206301
Publication date
Sep 6, 2007
Andreas Seifert
G02 - OPTICS
Information
Patent Application
Facet mirrors and a method for producing mirror facets
Publication number
20070019310
Publication date
Jan 25, 2007
Carl Zeiss SMT AG
Andreas Seifert
G02 - OPTICS
Information
Patent Application
Method for the production of a facetted mirror
Publication number
20050111067
Publication date
May 26, 2005
Andreas Seifert
G02 - OPTICS
Information
Patent Application
Facet mirror having a number of mirror facets
Publication number
20050030653
Publication date
Feb 10, 2005
Hubert Holderer
G02 - OPTICS
Information
Patent Application
Facet mirror having a number of mirror facets
Publication number
20050030656
Publication date
Feb 10, 2005
Hubert Holderer
G02 - OPTICS
Information
Patent Application
Focusing-device for the radiation from a light source
Publication number
20040130809
Publication date
Jul 8, 2004
Carl Zeiss SMT AG
Martin Antoni
G02 - OPTICS
Information
Patent Application
Focusing-device for the radiation from a light source
Publication number
20020113954
Publication date
Aug 22, 2002
Martin Antoni
G02 - OPTICS