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Andreas Steinrücke
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Talheim, DE
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last 30 patents
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Patent Grant
Device and method for processing substrates
Patent number
6,805,754
Issue date
Oct 19, 2004
Steag Micro Tech GmbH
Joachim Pokorny
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Substrate carrier
Patent number
6,569,302
Issue date
May 27, 2003
Steag Micro Tech GmbH
Andreas Steinrücke
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Fluid heater
Patent number
6,205,292
Issue date
Mar 20, 2001
STEAG MicroTech GmbH
Joachim Pokorny
F24 - HEATING RANGES VENTILATING