Andreas Tillmann

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Tomerdingen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for the thermal treatment of substrates
- Patent number 7,041,610
- Issue date May 9, 2006
- Steag RTP Systems GmbH
- Andreas Tillmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Localized heating and cooling of substrates
- Patent number 7,037,797
- Issue date May 2, 2006
- Mattson Technology, Inc.
- Sohaila Shooshtarian
- H01 - BASIC ELECTRIC ELEMENTS