Andrei Mikhailovich Yakunin

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Eindhoven, RU

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Patents Grantslast 30 patents

Information Patent Grant
Spectral purity filter, radiation source, lithographic apparatus, a...
- Patent number 9,195,144
- Issue date Nov 24, 2015
- ASML Netherlands B.V.
- Martin Jacobus Johan Jak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Radiation Source
- Publication number 20140253894
- Publication date Sep 11, 2014
- ASML Netherland B.V.
- Jan Bernard Plechelmus Van Schoot
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RADIATION SOURCE AND LITHOGRAPHIC APPARATUS
- Publication number 20110164236
- Publication date Jul 7, 2011
- ASML Netherlands B.V.
- Andrei Mikhailovich Yakunin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR