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Andrei Vladimirovich Pebalk
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Moscow, RU
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Patents Grants
last 30 patents
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Patent Grant
Polyparaxylylene film, production method therefor and semiconductor...
Patent number
6,946,405
Issue date
Sep 20, 2005
Hitachi, Ltd.
Akio Takahashi
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
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Patent Application
Organic polymer film, method for producing the same and semiconduct...
Publication number
20050156287
Publication date
Jul 21, 2005
Akio Takahashi
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Polyparaxylylene film, production method therefor and semiconductor...
Publication number
20050014388
Publication date
Jan 20, 2005
Akio Takahashi
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...