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Andrej Litwin
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Danderyd, SE
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last 30 patents
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Patent Grant
MEMS devices with voltage driven flexible elements
Patent number
6,818,959
Issue date
Nov 16, 2004
BTG International Limited
Lars G. Montelius
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
MEMS devices on a nanometer scale
Publication number
20030173647
Publication date
Sep 18, 2003
Lars G. Montelius
B81 - MICRO-STRUCTURAL TECHNOLOGY