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Andrej Makarovic
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Veldhoven, NL
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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method utilizing 2D...
Patent number
7,477,772
Issue date
Jan 13, 2009
ASML Netherlands B.V.
Andrej Makarovic
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, device manufac...
Patent number
7,321,416
Issue date
Jan 22, 2008
ASML Netherlands B.V.
Martinus Cornelis Reijnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Lithographic apparatus, device manufacturing method, device manufac...
Publication number
20060285094
Publication date
Dec 21, 2006
ASML NETHERLANDS B.V.
Martinus Cornelis Reijnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method utilizing 2D...
Publication number
20060269116
Publication date
Nov 30, 2006
ASML NETHERLANDS B.V.
Andrej Makarovic
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY