Andrew An Zeng

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus to fold optics in tools for measuring shape an...
- Patent number 9,903,708
- Issue date Feb 27, 2018
- KLA-Tencor Corporation
- Chunhai Wang
- G02 - OPTICS
Information Patent Grant
Reducing registration error of front and back wafer surfaces utiliz...
- Patent number 9,163,928
- Issue date Oct 20, 2015
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method and Apparatus to Fold Optics in Tools for Measuring Shape an...
- Publication number 20160265904
- Publication date Sep 15, 2016
- KLA-Tencor Corporation
- Chunhai Wang
- G02 - OPTICS
Information Patent Application
A DUAL INTERFEROMETER SYSTEM WITH A SHORT REFERENCE FLAT DISTANCE F...
- Publication number 20150176973
- Publication date Jun 25, 2015
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
Reducing Registration Error of Front and Back Wafer Surfaces Utiliz...
- Publication number 20140313516
- Publication date Oct 23, 2014
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING