Andrew Clark SERINO

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Livermore, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Selective atomic layer etching
- Patent number 10,847,375
- Issue date Nov 24, 2020
- Lam Research Corporation
- Chia-Chun Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SILICON ETCH WITH ORGANOCHLORIDE
- Publication number 20240429063
- Publication date Dec 26, 2024
- LAM RESEARCH CORPORATION
- Ilya PISKUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATION OF VAPOR DEPOSITION PROCESS INTO PLASMA ETCH REACTOR
- Publication number 20230260759
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Eric A. Hudson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH ASPECT RATIO DIELECTRIC ETCH WITH CHLORINE
- Publication number 20230127597
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Rui Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE ATOMIC LAYER ETCHING
- Publication number 20190393046
- Publication date Dec 26, 2019
- LAM RESEARCH CORPORATION
- Chia-Chun WANG
- H01 - BASIC ELECTRIC ELEMENTS