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Andrew Clark SERINO
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Livermore, CA, US
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last 30 patents
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Patent Grant
Selective atomic layer etching
Patent number
10,847,375
Issue date
Nov 24, 2020
Lam Research Corporation
Chia-Chun Wang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SILICON ETCH WITH ORGANOCHLORIDE
Publication number
20240429063
Publication date
Dec 26, 2024
LAM RESEARCH CORPORATION
Ilya PISKUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATION OF VAPOR DEPOSITION PROCESS INTO PLASMA ETCH REACTOR
Publication number
20230260759
Publication date
Aug 17, 2023
LAM RESEARCH CORPORATION
Eric A. Hudson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
HIGH ASPECT RATIO DIELECTRIC ETCH WITH CHLORINE
Publication number
20230127597
Publication date
Apr 27, 2023
LAM RESEARCH CORPORATION
Rui Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE ATOMIC LAYER ETCHING
Publication number
20190393046
Publication date
Dec 26, 2019
LAM RESEARCH CORPORATION
Chia-Chun WANG
H01 - BASIC ELECTRIC ELEMENTS