Andrew Clark SERINO

Person

  • Livermore, CA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Selective atomic layer etching

    • Patent number 10,847,375
    • Issue date Nov 24, 2020
    • Lam Research Corporation
    • Chia-Chun Wang
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents