Andrew Cowe

Person

Andover, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Valve apparatuses and related methods for reactive process gas isol...
- Patent number 11,854,839
- Issue date Dec 26, 2023
- MKS Instruments, Inc.
- Andrew B. Cowe
- B08 - CLEANING
Information Patent Grant
Method and apparatus for plasma generation
- Patent number 11,664,197
- Issue date May 30, 2023
- MKS Instruments, Inc.
- Gordon Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems, methods and apparatus for choked flow element extraction
- Patent number 10,424,460
- Issue date Sep 24, 2019
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distributed multi-zone plasma source systems, methods and apparatus
- Patent number 10,283,325
- Issue date May 7, 2019
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distributed, concentric multi-zone plasma source systems, methods a...
- Patent number 9,967,965
- Issue date May 8, 2018
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, methods and apparatus for choked flow element extraction
- Patent number 9,449,793
- Issue date Sep 20, 2016
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Toroidal plasma chamber for high gas flow rate process
- Patent number 9,275,839
- Issue date Mar 1, 2016
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distributed multi-zone plasma source systems, methods and apparatus
- Patent number 9,155,181
- Issue date Oct 6, 2015
- Lam Research Corporation
- Ali Shajii
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Pinched plasma bridge flood gun for substrate charge neutralization
- Patent number 9,070,538
- Issue date Jun 30, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable microchamber system with gas curtain
- Patent number 9,029,809
- Issue date May 12, 2015
- Ultratech, Inc.
- Digby Pun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems, methods and apparatus for separate plasma source control
- Patent number 8,999,104
- Issue date Apr 7, 2015
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of providing power to ignite and sustain a pla...
- Patent number 8,692,466
- Issue date Apr 8, 2014
- MKS Instruments Inc.
- Souheil Benzerrouk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle trap for a plasma source
- Patent number 7,914,603
- Issue date Mar 29, 2011
- MKS Instruments, Inc.
- Ali Shajii
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Toroidal low-field reactive gas and plasma source having a dielectr...
- Patent number 7,659,489
- Issue date Feb 9, 2010
- MKS Instruments, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Toroidal low-field reactive gas and plasma source having a dielectr...
- Patent number 7,501,600
- Issue date Mar 10, 2009
- MKS Instruments, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively-coupled torodial plasma source
- Patent number 7,166,816
- Issue date Jan 23, 2007
- MKS Instruments, Inc.
- Xing Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Toroidal low-field reactive gas and plasma source having a dielectr...
- Patent number 6,872,909
- Issue date Mar 29, 2005
- Applied Science and Technology, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively-coupled toroidal plasma source
- Patent number 6,815,633
- Issue date Nov 9, 2004
- Applied Science and Technology, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PLASMA GENERATION
- Publication number 20240079209
- Publication date Mar 7, 2024
- MKS Instruments, Inc.
- Ron Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE APPARATUSES AND RELATED METHODS FOR REACTIVE PROCESS GAS ISOL...
- Publication number 20230296181
- Publication date Sep 21, 2023
- MKS Instruments, Inc.
- Andrew Cowe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
HEATED THROTTLE VALVE APPARATUS AND METHODS OF USE AND MANUFACTURE
- Publication number 20230258283
- Publication date Aug 17, 2023
- MKS Instruments, Inc.
- Robert M. CURRY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PLASMA GENERATION
- Publication number 20230036853
- Publication date Feb 2, 2023
- MKS Instruments, Inc.
- Gordon Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Valve Apparatuses and Related Methods for Reactive Process Gas Isol...
- Publication number 20210327727
- Publication date Oct 21, 2021
- MKS Instruments, Inc.
- Andrew B. Cowe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Heated Throttle Valve Apparatus and Methods of Use and Manufacture
- Publication number 20200332920
- Publication date Oct 22, 2020
- MKS Insturments, Inc
- Robert M Curry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Metho...
- Publication number 20180228015
- Publication date Aug 9, 2018
- LAM RESEARCH CORPORATION
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems, Methods and Apparatus for Choked Flow Element Extraction
- Publication number 20160358754
- Publication date Dec 8, 2016
- LAM RESEARCH CORPORATION
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PINCHED PLASMA BRIDGE FLOOD GUN FOR SUBSTRATE CHARGE NEUTRALIZATION
- Publication number 20150115796
- Publication date Apr 30, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Movable microchamber system with gas curtain
- Publication number 20140151344
- Publication date Jun 5, 2014
- Ultratech, Inc.
- Digby PUN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS
- Publication number 20140096908
- Publication date Apr 10, 2014
- LAM RESEARCH CORPORATION
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Metho...
- Publication number 20130025788
- Publication date Jan 31, 2013
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, METHODS AND APPARATUS FOR CHOKED FLOW ELEMENT EXTRACTION
- Publication number 20120035766
- Publication date Feb 9, 2012
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS
- Publication number 20120034394
- Publication date Feb 9, 2012
- Ali Shajii
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS, METHODS AND APPARATUS FOR SEPARATE PLASMA SOURCE CONTROL
- Publication number 20120031876
- Publication date Feb 9, 2012
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Apparatus for Protecting Plasma Chamber Surfaces
- Publication number 20110005922
- Publication date Jan 13, 2011
- MKS Instruments, Inc.
- Chiu-Ying Tai
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and Apparatus of Providing Power to Ignite and Sustain a Pla...
- Publication number 20100219757
- Publication date Sep 2, 2010
- Souheil Benzerrouk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal plasma chamber for high gas flow rate process
- Publication number 20100206847
- Publication date Aug 19, 2010
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE TRAP FOR A PLASMA SOURCE
- Publication number 20090320677
- Publication date Dec 31, 2009
- MKS Instruments, Inc.
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle Reduction Through Gas and Plasma Source Control
- Publication number 20080302652
- Publication date Dec 11, 2008
- MKS Instruments, Inc.
- William Robert Entley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectr...
- Publication number 20070145023
- Publication date Jun 28, 2007
- MKS Instruments, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal low-field reactive gas and plasma source having a dielectr...
- Publication number 20050145173
- Publication date Jul 7, 2005
- MKS Instruments, Inc.
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal low-field reactive gas and plasma source having a dielectr...
- Publication number 20040206730
- Publication date Oct 21, 2004
- Applied Science & Technology
- William M. Holber
- H01 - BASIC ELECTRIC ELEMENTS

Andrew Cowe

Person

Patents Grantslast 30 patents

Valve apparatuses and related methods for reactive process gas isol...

Method and apparatus for plasma generation

Systems, methods and apparatus for choked flow element extraction

Distributed multi-zone plasma source systems, methods and apparatus

Distributed, concentric multi-zone plasma source systems, methods a...

Systems, methods and apparatus for choked flow element extraction

Toroidal plasma chamber for high gas flow rate process

Distributed multi-zone plasma source systems, methods and apparatus

Pinched plasma bridge flood gun for substrate charge neutralization

Movable microchamber system with gas curtain

Systems, methods and apparatus for separate plasma source control

Method and apparatus of providing power to ignite and sustain a pla...

Particle trap for a plasma source

Toroidal low-field reactive gas and plasma source having a dielectr...

Toroidal low-field reactive gas and plasma source having a dielectr...

Inductively-coupled torodial plasma source

Toroidal low-field reactive gas and plasma source having a dielectr...

Inductively-coupled toroidal plasma source

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR PLASMA GENERATION

VALVE APPARATUSES AND RELATED METHODS FOR REACTIVE PROCESS GAS ISOL...

HEATED THROTTLE VALVE APPARATUS AND METHODS OF USE AND MANUFACTURE

METHOD AND APPARATUS FOR PLASMA GENERATION

Valve Apparatuses and Related Methods for Reactive Process Gas Isol...

Heated Throttle Valve Apparatus and Methods of Use and Manufacture

Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Metho...

Systems, Methods and Apparatus for Choked Flow Element Extraction

PINCHED PLASMA BRIDGE FLOOD GUN FOR SUBSTRATE CHARGE NEUTRALIZATION

Movable microchamber system with gas curtain

DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS

Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Metho...

SYSTEMS, METHODS AND APPARATUS FOR CHOKED FLOW ELEMENT EXTRACTION

DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS

SYSTEMS, METHODS AND APPARATUS FOR SEPARATE PLASMA SOURCE CONTROL

Methods and Apparatus for Protecting Plasma Chamber Surfaces

Method and Apparatus of Providing Power to Ignite and Sustain a Pla...

Toroidal plasma chamber for high gas flow rate process

PARTICLE TRAP FOR A PLASMA SOURCE

Particle Reduction Through Gas and Plasma Source Control

Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectr...

Toroidal low-field reactive gas and plasma source having a dielectr...

Toroidal low-field reactive gas and plasma source having a dielectr...