Andrew H. Breninger

Person

Hillsboro, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma viewport
- Patent number 12,272,534
- Issue date Apr 8, 2025
- Lam Researh Corporation
- Bin Luo
- G02 - OPTICS
Information Patent Grant
Multilayer coatings of component parts for a work piece processing...
- Patent number 12,266,509
- Issue date Apr 1, 2025
- Lam Researh Corporation
- Paul Konkola
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 12,227,837
- Issue date Feb 18, 2025
- Lam Research Corporation
- Damodar Rajaram Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 12,163,219
- Issue date Dec 10, 2024
- Lam Research Corporation
- Damodar Rajaram Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 11,365,479
- Issue date Jun 21, 2022
- Lam Research Corporation
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 10,760,158
- Issue date Sep 1, 2020
- Lam Research Corporation
- Damodar Shanbhag
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift pin holder with spring retention for substrate processing systems
- Patent number 10,460,977
- Issue date Oct 29, 2019
- Lam Research Corporation
- Andrew H. Breninger
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Purging light beam paths in optical equipment
- Patent number 7,016,039
- Issue date Mar 21, 2006
- Hinds Instruments, Inc.
- Andrew O. Breninger
- G01 - MEASURING TESTING
Information Patent Grant
Adjustable sample holder for optical equipment
- Patent number 6,765,734
- Issue date Jul 20, 2004
- Hinds Instruments, Inc.
- Christopher O. Griffiths
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PLASMA VIEWPORT
- Publication number 20250226191
- Publication date Jul 10, 2025
- LAM RESEARCH CORPORATION
- Bin Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER LIFT PIN MECHANISM FOR PREVENTING LOCAL BACKSIDE DEPOSITION
- Publication number 20230099332
- Publication date Mar 30, 2023
- LAM RESEARCH CORPORATION
- Andrew H. Breninger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20230002891
- Publication date Jan 5, 2023
- LAM RESEARCH CORPORATION
- Damodar Rajaram SHANBHAG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COIN-SLOT AND BALL-LOCK CERAMIC LIFT PIN HOLDERS
- Publication number 20220406645
- Publication date Dec 22, 2022
- LAM RESEARCH CORPORATION
- Aleksey V. ALTECOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA VIEWPORT
- Publication number 20220301835
- Publication date Sep 22, 2022
- LAM RESEARCH CORPORATION
- Bin Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20220275504
- Publication date Sep 1, 2022
- LAM RESEARCH CORPORATION
- Damodar Rajaram SHANBHAG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER COATINGS OF COMPONENT PARTS FOR A WORK PIECE PROCESSING...
- Publication number 20220028662
- Publication date Jan 27, 2022
- Paul KONKOLA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20200347497
- Publication date Nov 5, 2020
- LAM RESEARCH CORPORATION
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20190185999
- Publication date Jun 20, 2019
- LAM RESEARCH CORPORATION
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIFT PIN HOLDER WITH SPRING RETENTION FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20180090363
- Publication date Mar 29, 2018
- LAM RESEARCH CORPORATION
- Andrew H. Breninger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Purging light beam paths in optical equipment
- Publication number 20040156049
- Publication date Aug 12, 2004
- Hinds Instruments, Inc.
- Andrew H. Breninger
- G02 - OPTICS

Andrew H. Breninger

Person

Patents Grantslast 30 patents

Plasma viewport

Multilayer coatings of component parts for a work piece processing...

Ex situ coating of chamber components for semiconductor processing

Ex situ coating of chamber components for semiconductor processing

Ex situ coating of chamber components for semiconductor processing

Ex situ coating of chamber components for semiconductor processing

Lift pin holder with spring retention for substrate processing systems

Purging light beam paths in optical equipment

Adjustable sample holder for optical equipment

Patents Applicationslast 30 patents

PLASMA VIEWPORT

WAFER LIFT PIN MECHANISM FOR PREVENTING LOCAL BACKSIDE DEPOSITION

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

COIN-SLOT AND BALL-LOCK CERAMIC LIFT PIN HOLDERS

PLASMA VIEWPORT

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

MULTILAYER COATINGS OF COMPONENT PARTS FOR A WORK PIECE PROCESSING...

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

LIFT PIN HOLDER WITH SPRING RETENTION FOR SUBSTRATE PROCESSING SYSTEMS

Purging light beam paths in optical equipment