Andrew J. Graven

Person

  • San Jose, CA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Method and apparatus for clamping a substrate

    • Patent number 5,894,400
    • Issue date Apr 13, 1999
    • WJ Semiconductor Equipment Group, Inc.
    • Andrew J. Graven
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER