Andrew J. Hazelton

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Immersion lithography fluid control system regulating flow velocity...
- Patent number 9,618,852
- Issue date Apr 11, 2017
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 9,304,409
- Issue date Apr 5, 2016
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 9,244,362
- Issue date Jan 26, 2016
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 8,836,914
- Issue date Sep 16, 2014
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 8,830,443
- Issue date Sep 9, 2014
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 8,810,768
- Issue date Aug 19, 2014
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography fluid control system changing flow velocity o...
- Patent number 8,797,500
- Issue date Aug 5, 2014
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer table having sensor for immersion lithography
- Patent number 8,508,718
- Issue date Aug 13, 2013
- Nikon Corporation
- Andrew J Hazelton
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Immersion lithography fluid control system regulating gas velocity...
- Patent number 8,497,973
- Issue date Jul 30, 2013
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 8,456,610
- Issue date Jun 4, 2013
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography fluid control system using an electric or mag...
- Patent number 8,102,501
- Issue date Jan 24, 2012
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 8,089,610
- Issue date Jan 3, 2012
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 8,059,258
- Issue date Nov 15, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 7,969,552
- Issue date Jun 28, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 7,965,376
- Issue date Jun 21, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 7,932,989
- Issue date Apr 26, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 7,932,995
- Issue date Apr 26, 2011
- Nikon Corporation
- Andrew J. Hazelton
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 7,929,111
- Issue date Apr 19, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 7,929,110
- Issue date Apr 19, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage assembly with lightweight fine stage and low transmissibility
- Patent number 7,869,000
- Issue date Jan 11, 2011
- Nikon Corporation
- Yoichi Arai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 7,839,486
- Issue date Nov 23, 2010
- Nikon Corporation
- Andrew J. Hazelton
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 7,821,615
- Issue date Oct 26, 2010
- Nikon Corporation
- W. Thomas Novak
Information Patent Grant
Wafer positioner with planar motor and mag-lev fine stage
- Patent number RE41232
- Issue date Apr 20, 2010
- Nikon Corporation
- Andrew J. Hazelton
- 310 - Electrical generator or motor structure
Information Patent Grant
Cleanup method for optics in immersion lithography
- Patent number 7,522,259
- Issue date Apr 21, 2009
- Nikon Corporation
- Andrew J Hazelton
- B08 - CLEANING
Information Patent Grant
Wafer table for immersion lithography
- Patent number 7,486,380
- Issue date Feb 3, 2009
- Nikon Corporation
- Andrew J Hazelton
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Z actuator with anti-gravity
- Patent number 7,462,958
- Issue date Dec 9, 2008
- Nikon Corporation
- Andrew J. Hazelton
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 7,456,930
- Issue date Nov 25, 2008
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 7,443,482
- Issue date Oct 28, 2008
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High efficiency voice coil motor
- Patent number 7,368,838
- Issue date May 6, 2008
- Nikon Corporation
- Michael B. Binnard
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 7,345,742
- Issue date Mar 18, 2008
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...
- Publication number 20140320831
- Publication date Oct 30, 2014
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY
- Publication number 20140253888
- Publication date Sep 11, 2014
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAFER TABLE HAVING SENSOR FOR IMMERSION LITHOGRAPHY
- Publication number 20130301016
- Publication date Nov 14, 2013
- Nikon Corporation
- Andrew J. Hazelton
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
WAFER TABLE HAVING SENSOR FOR IMMERSION LITHOGRAPHY
- Publication number 20130301018
- Publication date Nov 14, 2013
- Andrew J. HAZELTON
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...
- Publication number 20120262684
- Publication date Oct 18, 2012
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid jet and recovery system for immersion lithography
- Publication number 20120019792
- Publication date Jan 26, 2012
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Environmental system including a transport region for an immersion...
- Publication number 20110235007
- Publication date Sep 29, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Environmental system including vacuum scavenge for an immersion lit...
- Publication number 20110037959
- Publication date Feb 17, 2011
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid jet and recovery system for immersion lithography
- Publication number 20110031416
- Publication date Feb 10, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cleanup method for optics in immersion lithography
- Publication number 20090195762
- Publication date Aug 6, 2009
- Nikon Corporation
- Andrew J. Hazelton
- B08 - CLEANING
Information Patent Application
Environmental system including vacuum scavenge for an immersion lit...
- Publication number 20090180096
- Publication date Jul 16, 2009
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cleanup method for optics in immersion lithography
- Publication number 20090174872
- Publication date Jul 9, 2009
- Nikon Corporation
- Andrew J. Hazelton
- B08 - CLEANING
Information Patent Application
Cleanup method for optics in immersion lithography
- Publication number 20090161084
- Publication date Jun 25, 2009
- Nikon Corporation
- Andrew J. Hazelton
- B08 - CLEANING
Information Patent Application
Wafer table for immersion lithography
- Publication number 20090109418
- Publication date Apr 30, 2009
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography fluid control system
- Publication number 20090075212
- Publication date Mar 19, 2009
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography fluid control system
- Publication number 20090075211
- Publication date Mar 19, 2009
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid jet and recovery system for immersion lithography
- Publication number 20090051888
- Publication date Feb 26, 2009
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High Efficiency Voice Coil Motor
- Publication number 20080165450
- Publication date Jul 10, 2008
- Nikon Corporation
- Michael B. Binnard
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
High Efficiency Voice Coil Motor
- Publication number 20080165451
- Publication date Jul 10, 2008
- Nikon Corporation
- Michael B. Binnard
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Fine Stage Z Support Apparatus
- Publication number 20080105069
- Publication date May 8, 2008
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cleanup method for optics in immersion lithography
- Publication number 20080100813
- Publication date May 1, 2008
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid jet and recovery system for immersion lithography
- Publication number 20080030698
- Publication date Feb 7, 2008
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Environmental system including a transport region for an immersion...
- Publication number 20080030704
- Publication date Feb 7, 2008
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography fluid control system
- Publication number 20070268468
- Publication date Nov 22, 2007
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography fluid control system
- Publication number 20070263184
- Publication date Nov 15, 2007
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Environmental system including a transport region for an immersion...
- Publication number 20070258062
- Publication date Nov 8, 2007
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Environmental system including a transport region for an immersion...
- Publication number 20070252961
- Publication date Nov 1, 2007
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Environmental system including a transport region for an immersion...
- Publication number 20070252962
- Publication date Nov 1, 2007
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cleanup method for optics in immersion lithography
- Publication number 20070247601
- Publication date Oct 25, 2007
- Nikon Corporation
- Andrew J. Hazelton
- B08 - CLEANING
Information Patent Application
Environmental system including vacuum scavenge for an immersion lit...
- Publication number 20070247603
- Publication date Oct 25, 2007
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Andrew J. Hazelton

Person

Patents Grantslast 30 patents

Immersion lithography fluid control system regulating flow velocity...

Liquid jet and recovery system for immersion lithography

Environmental system including vacuum scavenge for an immersion lit...

Environmental system including vacuum scavenge for an immersion lit...

Environmental system including a transport region for an immersion...

Environmental system including vacuum scavenge for an immersion lit...

Immersion lithography fluid control system changing flow velocity o...

Wafer table having sensor for immersion lithography

Immersion lithography fluid control system regulating gas velocity...

Environmental system including vacuum scavenge for an immersion lit...

Immersion lithography fluid control system using an electric or mag...

Environmental system including vacuum scavenge for an immersion lit...

Liquid jet and recovery system for immersion lithography

Environmental system including a transport region for an immersion...

Environmental system including a transport region for an immersion...

Liquid jet and recovery system for immersion lithography

Environmental system including vacuum scavenge for an immersion lit...

Environmental system including a transport region for an immersion...

Environmental system including a transport region for an immersion...

Stage assembly with lightweight fine stage and low transmissibility

Environmental system including vacuum scavenge for an immersion lit...

Liquid jet and recovery system for immersion lithography

Wafer positioner with planar motor and mag-lev fine stage

Cleanup method for optics in immersion lithography

Wafer table for immersion lithography

Z actuator with anti-gravity

Environmental system including vacuum scavenge for an immersion lit...

Liquid jet and recovery system for immersion lithography

High efficiency voice coil motor

Environmental system including a transport region for an immersion...

Patents Applicationslast 30 patents

ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...

LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY

WAFER TABLE HAVING SENSOR FOR IMMERSION LITHOGRAPHY

WAFER TABLE HAVING SENSOR FOR IMMERSION LITHOGRAPHY

ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...

Liquid jet and recovery system for immersion lithography

Environmental system including a transport region for an immersion...

Environmental system including vacuum scavenge for an immersion lit...

Liquid jet and recovery system for immersion lithography

Cleanup method for optics in immersion lithography

Environmental system including vacuum scavenge for an immersion lit...

Cleanup method for optics in immersion lithography

Cleanup method for optics in immersion lithography

Wafer table for immersion lithography

Immersion lithography fluid control system

Immersion lithography fluid control system

Liquid jet and recovery system for immersion lithography

High Efficiency Voice Coil Motor

High Efficiency Voice Coil Motor

Fine Stage Z Support Apparatus

Cleanup method for optics in immersion lithography

Liquid jet and recovery system for immersion lithography

Environmental system including a transport region for an immersion...

Immersion lithography fluid control system

Immersion lithography fluid control system

Environmental system including a transport region for an immersion...

Environmental system including a transport region for an immersion...

Environmental system including a transport region for an immersion...

Cleanup method for optics in immersion lithography

Environmental system including vacuum scavenge for an immersion lit...