Andrew J. Nagengast

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Retaining ring having inner surfaces with features
- Patent number 12,048,981
- Issue date Jul 30, 2024
- Applied Materials, Inc.
- Steven Mark Reedy
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing carrier head with piezoelectric pressure control
- Patent number 12,030,156
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Brian J. Brown
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring having inner surfaces with facets
- Patent number 12,033,865
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head with local wafer pressure
- Patent number 11,986,923
- Issue date May 21, 2024
- Applied Materials, Inc.
- Andrew Nagengast
- B24 - GRINDING POLISHING
Information Patent Grant
Dual membrane carrier head for chemical mechanical polishing
- Patent number 11,945,073
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Deformable substrate chuck
- Patent number 11,931,857
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus with contact extension or adjustable...
- Patent number 11,904,429
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing carrier head with piezoelectric pressure control
- Patent number 11,890,715
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Brian J. Brown
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing carrier head with multiple angular pressurizable zones
- Patent number 11,780,049
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Pivotable substrate retaining ring
- Patent number 11,724,357
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring having inner surfaces with facets
- Patent number 11,682,561
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Retaining ring for CMP
- Patent number 11,673,226
- Issue date Jun 13, 2023
- Applied Materials, Inc.
- Andrew J. Nagengast
- B24 - GRINDING POLISHING
Information Patent Grant
Dual loading retaining ring
- Patent number 11,660,721
- Issue date May 30, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head retaining ring tilting moment control
- Patent number 11,623,321
- Issue date Apr 11, 2023
- Applied Materials, Inc.
- Andrew Nagengast
- B24 - GRINDING POLISHING
Information Patent Grant
Pivotable substrate retaining ring
- Patent number 11,511,390
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring having inner surfaces with features
- Patent number 11,453,099
- Issue date Sep 27, 2022
- Applied Materials, Inc.
- Steven Mark Reedy
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring design
- Patent number 11,400,560
- Issue date Aug 2, 2022
- Applied Materials, Inc.
- Jeonghoon Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Retainer for chemical mechanical polishing carrier head
- Patent number 11,344,991
- Issue date May 31, 2022
- Applied Materials, Inc.
- Andrew J. Nagengast
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring having inner surfaces with facets
- Patent number 11,056,350
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Textured membrane for a multi-chamber carrier head
- Patent number 10,702,971
- Issue date Jul 7, 2020
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring having inner surfaces with features
- Patent number 10,500,695
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Steven Mark Reedy
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring for CMP
- Patent number 10,322,492
- Issue date Jun 18, 2019
- Applied Materials, Inc.
- Andrew J. Nagengast
- B24 - GRINDING POLISHING
Information Patent Grant
Configurable pressure design for multizone chemical mechanical plan...
- Patent number 9,610,672
- Issue date Apr 4, 2017
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Textured membrane for a multi-chamber carrier head
- Patent number 9,452,505
- Issue date Sep 27, 2016
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring having inner surfaces with facets
- Patent number 9,368,371
- Issue date Jun 14, 2016
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
End effector having multiple-position contact points
- Patent number 9,214,375
- Issue date Dec 15, 2015
- Lam Research Corporation
- Matthew J. Rodnick
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Multi-chamber carrier head with a textured membrane
- Patent number 8,808,062
- Issue date Aug 19, 2014
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Grant
Bonding apparatus and method
- Patent number 8,545,660
- Issue date Oct 1, 2013
- GTAT Corporation
- Steven M. Zuniga
- B32 - LAYERED PRODUCTS
Information Patent Grant
Retaining ring and articles for carrier head
- Patent number 8,535,121
- Issue date Sep 17, 2013
- Applied Materials, Inc.
- Doyle E. Bennett
- B24 - GRINDING POLISHING
Information Patent Grant
Flexible membrane for carrier head
- Patent number 8,469,776
- Issue date Jun 25, 2013
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
RETAINING RING HAVING INNER SURFACES WITH FEATURES
- Publication number 20240316723
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Steven Mark Reedy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING HEAD WITH LOCAL WAFER PRESSURE
- Publication number 20240253179
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Andrew NAGENGAST
- B24 - GRINDING POLISHING
Information Patent Application
DEFORMABLE SUBSTRATE CHUCK
- Publication number 20240173816
- Publication date May 30, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACOUSTIC CARRIER HEAD MONITORING
- Publication number 20240139900
- Publication date May 2, 2024
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
RETAINER FOR CHEMICAL MECHANICAL POLISHING CARRIER HEAD
- Publication number 20240075584
- Publication date Mar 7, 2024
- Applied Materials, Inc.
- Andrew J. Nagengast
- B24 - GRINDING POLISHING
Information Patent Application
DUAL MEMBRANE CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20240042574
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING CARRIER HEAD WITH MULTIPLE ZONES
- Publication number 20230405758
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20230381917
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
OPERATION OF CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20230381915
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM
- Publication number 20230356354
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL
- Publication number 20230356355
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
Retaining Ring Having Inner Surfaces with Facets
- Publication number 20230290645
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
PIVOTABLE SUBSTRATE RETAINING RING
- Publication number 20230070746
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING HAVING INNER SURFACES WITH FEATURES
- Publication number 20230019815
- Publication date Jan 19, 2023
- Applied Materials, Inc.
- Steven Mark Reedy
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING DESIGN
- Publication number 20220339755
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Jeonghoon OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING CARRIER HEAD WITH FLOATING EDGE CONTROL
- Publication number 20220281064
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
MACHINE LEARNING FOR CLASSIFYING RETAINING RINGS
- Publication number 20220281052
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Eric Lau
- B24 - GRINDING POLISHING
Information Patent Application
DUAL LOADING RETAINING RING
- Publication number 20220258301
- Publication date Aug 18, 2022
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD WITH LOCAL WAFER PRESSURE
- Publication number 20220143779
- Publication date May 12, 2022
- Applied Materials, Inc.
- Andrew NAGENGAST
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD RETAINING RING TILTING MOMENT CONTROL
- Publication number 20220111483
- Publication date Apr 14, 2022
- Applied Materials, Inc.
- Andrew NAGENGAST
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS WITH CONTACT EXTENSION OR ADJUSTABLE...
- Publication number 20220111482
- Publication date Apr 14, 2022
- Applied Materials, Inc.
- Steven M. ZUNIGA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD RETAINING RING TILTING MOMENT CONTROL
- Publication number 20220111484
- Publication date Apr 14, 2022
- Applied Materials, Inc.
- Andrew NAGENGAST
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING CARRIER HEAD WITH PIEZOELECTRIC PRESSURE CONTROL
- Publication number 20210402546
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Brian J. Brown
- B24 - GRINDING POLISHING
Information Patent Application
DEFORMABLE SUBSTRATE CHUCK
- Publication number 20210402557
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING CARRIER HEAD WITH MULTIPLE ANGULAR PRESSURIZABLE ZONES
- Publication number 20210402558
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING CARRIER HEAD WITH PIEZOELECTRIC PRESSURE CONTROL
- Publication number 20210402547
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Brian J. Brown
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING CARRIER HEAD WITH MULTIPLE ANGULAR PRESSURIZABLE ZONES
- Publication number 20210402549
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
Retaining Ring Having Inner Surfaces with Facets
- Publication number 20210249276
- Publication date Aug 12, 2021
- Applied Materials, Inc.
- Jeonghoon Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIVOTABLE SUBSTRATE RETAINING RING
- Publication number 20210060726
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
DUAL MEMBRANE CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20210053183
- Publication date Feb 25, 2021
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING

Andrew J. Nagengast

Person

Patents Grantslast 30 patents

Retaining ring having inner surfaces with features

Polishing carrier head with piezoelectric pressure control

Retaining ring having inner surfaces with facets

Polishing head with local wafer pressure

Dual membrane carrier head for chemical mechanical polishing

Deformable substrate chuck

Substrate polishing apparatus with contact extension or adjustable...

Polishing carrier head with piezoelectric pressure control

Polishing carrier head with multiple angular pressurizable zones

Pivotable substrate retaining ring

Retaining ring having inner surfaces with facets

Retaining ring for CMP

Dual loading retaining ring

Polishing head retaining ring tilting moment control

Pivotable substrate retaining ring

Retaining ring having inner surfaces with features

Retaining ring design

Retainer for chemical mechanical polishing carrier head

Retaining ring having inner surfaces with facets

Textured membrane for a multi-chamber carrier head

Retaining ring having inner surfaces with features

Retaining ring for CMP

Configurable pressure design for multizone chemical mechanical plan...

Textured membrane for a multi-chamber carrier head

Retaining ring having inner surfaces with facets

End effector having multiple-position contact points

Multi-chamber carrier head with a textured membrane

Bonding apparatus and method

Retaining ring and articles for carrier head

Flexible membrane for carrier head

Patents Applicationslast 30 patents

RETAINING RING HAVING INNER SURFACES WITH FEATURES

POLISHING HEAD WITH LOCAL WAFER PRESSURE

DEFORMABLE SUBSTRATE CHUCK

ACOUSTIC CARRIER HEAD MONITORING

RETAINER FOR CHEMICAL MECHANICAL POLISHING CARRIER HEAD

DUAL MEMBRANE CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING

POLISHING CARRIER HEAD WITH MULTIPLE ZONES

CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING

OPERATION OF CLAMPING RETAINER FOR CHEMICAL MECHANICAL POLISHING

COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM

POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL

Retaining Ring Having Inner Surfaces with Facets

PIVOTABLE SUBSTRATE RETAINING RING

RETAINING RING HAVING INNER SURFACES WITH FEATURES

RETAINING RING DESIGN

POLISHING CARRIER HEAD WITH FLOATING EDGE CONTROL

MACHINE LEARNING FOR CLASSIFYING RETAINING RINGS

DUAL LOADING RETAINING RING

POLISHING HEAD WITH LOCAL WAFER PRESSURE

POLISHING HEAD RETAINING RING TILTING MOMENT CONTROL

SUBSTRATE POLISHING APPARATUS WITH CONTACT EXTENSION OR ADJUSTABLE...

POLISHING HEAD RETAINING RING TILTING MOMENT CONTROL

POLISHING CARRIER HEAD WITH PIEZOELECTRIC PRESSURE CONTROL

DEFORMABLE SUBSTRATE CHUCK

POLISHING CARRIER HEAD WITH MULTIPLE ANGULAR PRESSURIZABLE ZONES

POLISHING CARRIER HEAD WITH PIEZOELECTRIC PRESSURE CONTROL

POLISHING CARRIER HEAD WITH MULTIPLE ANGULAR PRESSURIZABLE ZONES

Retaining Ring Having Inner Surfaces with Facets

PIVOTABLE SUBSTRATE RETAINING RING

DUAL MEMBRANE CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING