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Andrew James BORTH

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  • Newberg, OR, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Concentration control using a bubbler
    • Patent number 12,209,310
    • Issue date Jan 28, 2025
    • Lam Research Corporation
    • Ramesh Chandrasekharan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Showerhead shroud
    • Patent number 11,488,810
    • Issue date Nov 1, 2022
    • Lam Research Corporation
    • Andrew Borth
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    WAFER TRANSFER PADDLES WITH MINIMUM CONTACT AREA STRUCTURES FOR RED...
    • Publication number 20250046644
    • Publication date Feb 6, 2025
    • LAM RESEARCH CORPORATION
    • Andrew Borth
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CONCENTRATION CONTROL USING A BUBBLER
    • Publication number 20230257878
    • Publication date Aug 17, 2023
    • LAM RESEARCH CORPORATION
    • Ramesh Chandrasekharan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPLIT SHOWERHEAD COOLING PLATE
    • Publication number 20230203658
    • Publication date Jun 29, 2023
    • LAM RESEARCH CORPORATION
    • Andrew BORTH
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPINDLE ASSEMBLY FOR WAFER TRANSFER IN A MULTI-STATION PROCESS MODULE
    • Publication number 20220262662
    • Publication date Aug 18, 2022
    • LAM RESEARCH CORPORATION
    • Andrew Borth
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SHOWERHEAD SHROUD
    • Publication number 20220110230
    • Publication date Apr 7, 2022
    • LAM RESEARCH CORPORATION
    • Andrew BORTH
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD SHROUD
    • Publication number 20220093372
    • Publication date Mar 24, 2022
    • LAM RESEARCH CORPORATION
    • Andrew BORTH
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CHEMICAL VAPOR DEPOSITION SHOWER HEAD FOR UNIFORM GAS DISTRIBUTION
    • Publication number 20190376184
    • Publication date Dec 12, 2019
    • LAM RESEARCH CORPORATION
    • Michael John SELEP
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...