Andrew Kenichi Duvall

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 11,127,567
- Issue date Sep 21, 2021
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 10,665,429
- Issue date May 26, 2020
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reducing backside deposition at wafer edge
- Patent number 10,648,079
- Issue date May 12, 2020
- Lam Research Corporation
- Chloe Baldasseroni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planar substrate edge contact with open volume equalization pathway...
- Patent number 10,622,243
- Issue date Apr 14, 2020
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for vapor delivery in a substrate processing sy...
- Patent number 9,970,108
- Issue date May 15, 2018
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 9,793,096
- Issue date Oct 17, 2017
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma suppression behind a showerhead through the use of increased...
- Patent number 9,758,868
- Issue date Sep 12, 2017
- Lam Research Corporation
- Patrick Girard Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for backside deposition reduction by control o...
- Patent number 9,428,833
- Issue date Aug 30, 2016
- Lam Research Corporation
- Andrew Duvall
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20200335304
- Publication date Oct 22, 2020
- LAM RESEARCH CORPORATION
- Hu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
- Publication number 20200227304
- Publication date Jul 16, 2020
- LAM RESEARCH CORPORATION
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20200219757
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- Patrick BREILING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
- Publication number 20180122685
- Publication date May 3, 2018
- LAM RESEARCH CORPORATION
- Patrick Breiling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20180068833
- Publication date Mar 8, 2018
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA SUPPRESSION BEHIND A SHOWERHEAD THROUGH THE USE OF INCREASED...
- Publication number 20170260627
- Publication date Sep 14, 2017
- LAM RESEARCH CORPORATION
- Patrick Girard Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCING BACKSIDE DEPOSITION AT WAFER EDGE
- Publication number 20160177444
- Publication date Jun 23, 2016
- LAM RESEARCH CORPORATION
- Chloe Baldasseroni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Suppressing Parasitic Plasma and Reducing W...
- Publication number 20160079036
- Publication date Mar 17, 2016
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW T...
- Publication number 20160056032
- Publication date Feb 25, 2016
- LAM RESEARCH CORPORATION
- Chloe Baldasseroni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR VAPOR DELIVERY
- Publication number 20160032453
- Publication date Feb 4, 2016
- LAM RESEARCH CORPORATION
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Andrew Kenichi Duvall

Person

Patents Grantslast 30 patents

Systems and methods for suppressing parasitic plasma and reducing w...

Systems and methods for suppressing parasitic plasma and reducing w...

Reducing backside deposition at wafer edge

Planar substrate edge contact with open volume equalization pathway...

Systems and methods for vapor delivery in a substrate processing sy...

Systems and methods for suppressing parasitic plasma and reducing w...

Plasma suppression behind a showerhead through the use of increased...

Method and apparatus for backside deposition reduction by control o...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

PLASMA SUPPRESSION BEHIND A SHOWERHEAD THROUGH THE USE OF INCREASED...

REDUCING BACKSIDE DEPOSITION AT WAFER EDGE

Systems and Methods for Suppressing Parasitic Plasma and Reducing W...

METHODS AND APPARATUSES FOR STABLE DEPOSITION RATE CONTROL IN LOW T...

SYSTEMS AND METHODS FOR VAPOR DELIVERY