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Andrew L. Nordquist
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Mountain View, CA, US
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last 30 patents
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Patent Grant
Apparatus and method for controlling plasma uniformity across a sub...
Patent number
6,497,796
Issue date
Dec 24, 2002
Novellus Systems, Inc.
Kaihan A. Ashtiani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Physical vapor deposition reactor including magnet to control flow...
Patent number
6,444,105
Issue date
Sep 3, 2002
Novellus Systems, Inc.
Kwok F. Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for controlling erosion profile in hollow cath...
Patent number
6,193,854
Issue date
Feb 27, 2001
Novellus Systems, Inc.
Kwok Fai Lai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Apparatus and method for controlling plasma uniformity across a sub...
Patent number
6,179,973
Issue date
Jan 30, 2001
Novellus Systems, Inc.
Kwok F. Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Triple-pane waveguide window
Patent number
4,688,009
Issue date
Aug 18, 1987
Varian Associates, Inc.
Patrick E. Ferguson
H01 - BASIC ELECTRIC ELEMENTS