Andrew Liu

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Milpitas, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for sensing a substrate in a load cup
- Patent number 9,013,176
- Issue date Apr 21, 2015
- Applied Materials, Inc.
- David J. Lischka
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR SENSING A SUBSTRATE IN A LOAD CUP
- Publication number 20130193956
- Publication date Aug 1, 2013
- Applied Materials, Inc.
- David J. Lischka
- G01 - MEASURING TESTING