Andrew Liu

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San Diego, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
EUV LPP source with improved dose control by combining pulse modula...
- Patent number 9,755,396
- Issue date Sep 5, 2017
- ASML Netherlands B.V.
- Paul Frihauf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of timing laser beam pulses to regulate extreme ultraviolet...
- Patent number 8,872,122
- Issue date Oct 28, 2014
- ASML Netherlands B.V.
- Alexander Schafgans
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method of timing laser beam pulses to regulate extreme ultraviolet...
- Patent number 8,872,123
- Issue date Oct 28, 2014
- ASML Netherlands B.V.
- James Crouch
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
Method of Timing Laser Beam Pulses to Regulate Extreme Ultraviolet...
- Publication number 20140191133
- Publication date Jul 10, 2014
- Cymer, Inc.
- James Crouch
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Method of Timing Laser Beam Pulses to Regulate Extreme Ultraviolet...
- Publication number 20140191132
- Publication date Jul 10, 2014
- Cymer, Inc.
- Alexander Schafgans
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING