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Andrew Lui
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for performing data management for a recipe-and-component c...
Patent number
8,295,963
Issue date
Oct 23, 2012
Lam Research Corporation
Chung-Ho Huang
G05 - CONTROLLING REGULATING
Information
Patent Grant
Recipe-and-component control module and methods thereof
Patent number
7,672,747
Issue date
Mar 2, 2010
Lam Research Corporation
Chung-Ho Huang
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Recipe report card framework and methods thereof
Patent number
7,558,641
Issue date
Jul 7, 2009
Lam Research Corporation
Chung-Ho Huang
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Plug and play sensor integration for a process module
Patent number
7,356,580
Issue date
Apr 8, 2008
Lam Research Corporation
Chung-Ho Huang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Etch endpoint detection
Patent number
6,855,567
Issue date
Feb 15, 2005
Lam Research Corporation
Tuqiang Ni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
End point determination of process residues in wafer-less auto clea...
Patent number
6,815,362
Issue date
Nov 9, 2004
Lam Research Corporation
Vincent Wong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integrated full wavelength spectrometer for wafer processing
Patent number
6,526,355
Issue date
Feb 25, 2003
Lam Research Corporation
Tuqiang Ni
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHODS FOR PERFORMING DATA MANAGEMENT FOR A RECIPE-AND-COMPONENT C...
Publication number
20100125360
Publication date
May 20, 2010
Chung-Ho Huang
G05 - CONTROLLING REGULATING
Information
Patent Application
RECIPE REPORT CARD FRAMEWORK AND METHODS THEREOF
Publication number
20080244400
Publication date
Oct 2, 2008
Chung-Ho Huang
G05 - CONTROLLING REGULATING
Information
Patent Application
RECIPE-AND-COMPONENT CONTROL MODULE AND METHODS THEREOF
Publication number
20080243988
Publication date
Oct 2, 2008
Chung-Ho Huang
G05 - CONTROLLING REGULATING
Information
Patent Application
Endpoint determination of process residues in wafer-less auto clean...
Publication number
20040235303
Publication date
Nov 25, 2004
LAM RESEARCH CORPORATION
Vincent Wong
B08 - CLEANING